Development of roll press UV imprint process for replication of micro lens array on the large and thin quartz substrate

L. Li, K. Ishii, Y. Tsutsui, S. Shoji, J. Mizuno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this study, micro lens arrays (MLAs) fabrication process was carried out using flexible replica mold and an original roll press UV imprint system. We successfully demonstrated MLAs fabrication process with high throughput. The lens patterns of 30 x 100 mm 2 in area replicated by two photo-curable resins were formed on the quartz substrate of 0.15 mm in thickness. This fabrication process is applicable for MLAs fabrication of next generation optical devices.

Original languageEnglish
Title of host publication2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
Pages27-30
Number of pages4
DOIs
Publication statusPublished - 2012 Jun 1
Externally publishedYes
Event7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 - Kyoto, Japan
Duration: 2012 Mar 52012 Mar 8

Publication series

Name2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012

Conference

Conference7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
CountryJapan
CityKyoto
Period12/3/512/3/8

Keywords

  • UV imprint
  • flexible replica mold
  • micro lens arrays
  • quartz substrate
  • roll press UV imprint system

ASJC Scopus subject areas

  • Engineering (miscellaneous)

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  • Cite this

    Li, L., Ishii, K., Tsutsui, Y., Shoji, S., & Mizuno, J. (2012). Development of roll press UV imprint process for replication of micro lens array on the large and thin quartz substrate. In 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 (pp. 27-30). [6196715] (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012). https://doi.org/10.1109/NEMS.2012.6196715