Development of roll press UV imprint process for replication of micro lens array on the large and thin quartz substrate

L. Li, K. Ishii, Y. Tsutsui, Shuichi Shoji, Jun Mizuno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study, micro lens arrays (MLAs) fabrication process was carried out using flexible replica mold and an original roll press UV imprint system. We successfully demonstrated MLAs fabrication process with high throughput. The lens patterns of 30 x 100 mm 2 in area replicated by two photo-curable resins were formed on the quartz substrate of 0.15 mm in thickness. This fabrication process is applicable for MLAs fabrication of next generation optical devices.

Original languageEnglish
Title of host publication2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
Pages27-30
Number of pages4
DOIs
Publication statusPublished - 2012
Externally publishedYes
Event7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 - Kyoto
Duration: 2012 Mar 52012 Mar 8

Other

Other7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
CityKyoto
Period12/3/512/3/8

Fingerprint

Quartz
Lenses
Fabrication
Substrates
Optical devices
Resins
Throughput

Keywords

  • flexible replica mold
  • micro lens arrays
  • quartz substrate
  • roll press UV imprint system
  • UV imprint

ASJC Scopus subject areas

  • Engineering (miscellaneous)

Cite this

Li, L., Ishii, K., Tsutsui, Y., Shoji, S., & Mizuno, J. (2012). Development of roll press UV imprint process for replication of micro lens array on the large and thin quartz substrate. In 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 (pp. 27-30). [6196715] https://doi.org/10.1109/NEMS.2012.6196715

Development of roll press UV imprint process for replication of micro lens array on the large and thin quartz substrate. / Li, L.; Ishii, K.; Tsutsui, Y.; Shoji, Shuichi; Mizuno, Jun.

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. p. 27-30 6196715.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Li, L, Ishii, K, Tsutsui, Y, Shoji, S & Mizuno, J 2012, Development of roll press UV imprint process for replication of micro lens array on the large and thin quartz substrate. in 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012., 6196715, pp. 27-30, 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, 12/3/5. https://doi.org/10.1109/NEMS.2012.6196715
Li L, Ishii K, Tsutsui Y, Shoji S, Mizuno J. Development of roll press UV imprint process for replication of micro lens array on the large and thin quartz substrate. In 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. p. 27-30. 6196715 https://doi.org/10.1109/NEMS.2012.6196715
Li, L. ; Ishii, K. ; Tsutsui, Y. ; Shoji, Shuichi ; Mizuno, Jun. / Development of roll press UV imprint process for replication of micro lens array on the large and thin quartz substrate. 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. pp. 27-30
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