Development of the single ion beam induced charge (SIBIC) imaging technique using the single ion microprobe system

Koh Meishoku, Hara Ken-ichi, Horita Katsuyuki, Shigeta Bungo, Matsukawa Takashi, Kishida Atsushi, Tanii Takashi, Goto Makoto, Ohdomari Iwao

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In order to minimize image degradation of IBIC (ion beam induced charge) during observation, the single ion beam induced charge (SIBIC) imaging technique has been developed by using a single ion microprobe, which enables us to hit a particular site of a device with single ions one by one. With only five He single ions per pixel, we have succeeded in obtaining reasonable quality images of an active area of a device. Since the number of defects induced by five single ions is quite low, the irradiated device was still alive for subsequent process and device diagnoses.

Original languageEnglish
Pages (from-to)82-86
Number of pages5
JournalNuclear Inst. and Methods in Physics Research, B
Volume93
Issue number1
DOIs
Publication statusPublished - 1994 Jul 1

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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