Development of the single ion beam induced charge (SIBIC) imaging technique using the single ion microprobe system

Koh Meishoku, Hara Ken-ichi, Horita Katsuyuki, Shigeta Bungo, Matsukawa Takashi, Kishida Atsushi, Takashi Tanii, Goto Makoto, Ohdomari Iwao

    Research output: Contribution to journalArticle

    1 Citation (Scopus)

    Abstract

    In order to minimize image degradation of IBIC (ion beam induced charge) during observation, the single ion beam induced charge (SIBIC) imaging technique has been developed by using a single ion microprobe, which enables us to hit a particular site of a device with single ions one by one. With only five He single ions per pixel, we have succeeded in obtaining reasonable quality images of an active area of a device. Since the number of defects induced by five single ions is quite low, the irradiated device was still alive for subsequent process and device diagnoses.

    Original languageEnglish
    Pages (from-to)82-86
    Number of pages5
    JournalNuclear Inst. and Methods in Physics Research, B
    Volume93
    Issue number1
    DOIs
    Publication statusPublished - 1994 Jul 1

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    imaging techniques
    Ion beams
    ion beams
    Ions
    Imaging techniques
    ions
    Image quality
    Pixels
    pixels
    degradation
    Degradation
    Defects
    defects

    ASJC Scopus subject areas

    • Surfaces, Coatings and Films
    • Instrumentation
    • Surfaces and Interfaces

    Cite this

    Development of the single ion beam induced charge (SIBIC) imaging technique using the single ion microprobe system. / Meishoku, Koh; Ken-ichi, Hara; Katsuyuki, Horita; Bungo, Shigeta; Takashi, Matsukawa; Atsushi, Kishida; Tanii, Takashi; Makoto, Goto; Iwao, Ohdomari.

    In: Nuclear Inst. and Methods in Physics Research, B, Vol. 93, No. 1, 01.07.1994, p. 82-86.

    Research output: Contribution to journalArticle

    Meishoku, Koh ; Ken-ichi, Hara ; Katsuyuki, Horita ; Bungo, Shigeta ; Takashi, Matsukawa ; Atsushi, Kishida ; Tanii, Takashi ; Makoto, Goto ; Iwao, Ohdomari. / Development of the single ion beam induced charge (SIBIC) imaging technique using the single ion microprobe system. In: Nuclear Inst. and Methods in Physics Research, B. 1994 ; Vol. 93, No. 1. pp. 82-86.
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    AU - Bungo, Shigeta

    AU - Takashi, Matsukawa

    AU - Atsushi, Kishida

    AU - Tanii, Takashi

    AU - Makoto, Goto

    AU - Iwao, Ohdomari

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