Diamond deposition on a large-area substrate by plasma-assisted chemical vapor deposition using an antenna-type coaxial microwave plasma generator

Norikazu Taniyama*, Minoru Kudo, Osamu Matsumoto, Hiroshi Kawarada

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)

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Engineering & Materials Science

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