DIELECTRIC PROPERTIES OF PLASMA POLYMERIZED TETRAFLUOROETHYLENE.

T. Nakano, Y. Kasama, Yoshimichi Ohki, K. Yahagi

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    Effects of carrier gas on the structure and tan delta of plasma polymerized tetrafluoroethylene thin film were investigated. The structure of the films were studied by ESR, ESCA and IR. Films polymerized using hydrogen as a carrier gas are cross-linked to a higher degree and have more radicals than those polymerized using argon as a carrier gas. The former shows higher tan delta value than the latter. Radicals are considered to be polyene type in both two kinds of films.

    Original languageEnglish
    Title of host publicationProceedings of the Symposium on Electrical Insulating Materials
    Place of PublicationTokyo, Jpn
    PublisherInst of Electrical Engineers of Japan
    Pages81-84
    Number of pages4
    Publication statusPublished - 1984

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    Dielectric properties
    Plasmas
    Gases
    Paramagnetic resonance
    Argon
    Thin films
    Hydrogen
    Polyenes

    ASJC Scopus subject areas

    • Engineering(all)

    Cite this

    Nakano, T., Kasama, Y., Ohki, Y., & Yahagi, K. (1984). DIELECTRIC PROPERTIES OF PLASMA POLYMERIZED TETRAFLUOROETHYLENE. In Proceedings of the Symposium on Electrical Insulating Materials (pp. 81-84). Tokyo, Jpn: Inst of Electrical Engineers of Japan.

    DIELECTRIC PROPERTIES OF PLASMA POLYMERIZED TETRAFLUOROETHYLENE. / Nakano, T.; Kasama, Y.; Ohki, Yoshimichi; Yahagi, K.

    Proceedings of the Symposium on Electrical Insulating Materials. Tokyo, Jpn : Inst of Electrical Engineers of Japan, 1984. p. 81-84.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Nakano, T, Kasama, Y, Ohki, Y & Yahagi, K 1984, DIELECTRIC PROPERTIES OF PLASMA POLYMERIZED TETRAFLUOROETHYLENE. in Proceedings of the Symposium on Electrical Insulating Materials. Inst of Electrical Engineers of Japan, Tokyo, Jpn, pp. 81-84.
    Nakano T, Kasama Y, Ohki Y, Yahagi K. DIELECTRIC PROPERTIES OF PLASMA POLYMERIZED TETRAFLUOROETHYLENE. In Proceedings of the Symposium on Electrical Insulating Materials. Tokyo, Jpn: Inst of Electrical Engineers of Japan. 1984. p. 81-84
    Nakano, T. ; Kasama, Y. ; Ohki, Yoshimichi ; Yahagi, K. / DIELECTRIC PROPERTIES OF PLASMA POLYMERIZED TETRAFLUOROETHYLENE. Proceedings of the Symposium on Electrical Insulating Materials. Tokyo, Jpn : Inst of Electrical Engineers of Japan, 1984. pp. 81-84
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    abstract = "Effects of carrier gas on the structure and tan delta of plasma polymerized tetrafluoroethylene thin film were investigated. The structure of the films were studied by ESR, ESCA and IR. Films polymerized using hydrogen as a carrier gas are cross-linked to a higher degree and have more radicals than those polymerized using argon as a carrier gas. The former shows higher tan delta value than the latter. Radicals are considered to be polyene type in both two kinds of films.",
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