DIELECTRIC PROPERTIES OF PLASMA POLYMERIZED TETRAFLUOROETHYLENE.

T. Nakano, Y. Kasama, Y. Ohki, K. Yahagi

Research output: Contribution to conferencePaperpeer-review

Abstract

Effects of carrier gas on the structure and tan delta of plasma polymerized tetrafluoroethylene thin film were investigated. The structure of the films were studied by ESR, ESCA and IR. Films polymerized using hydrogen as a carrier gas are cross-linked to a higher degree and have more radicals than those polymerized using argon as a carrier gas. The former shows higher tan delta value than the latter. Radicals are considered to be polyene type in both two kinds of films.

Original languageEnglish
Pages81-84
Number of pages4
Publication statusPublished - 1984 Dec 1

ASJC Scopus subject areas

  • Engineering(all)

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