Differential platinum thin film hydrogen gas sensor fabricated by MEMS techniques

Daisuke Yamazaki, Toshitsugu Ueda

    Research output: Contribution to journalArticle

    5 Citations (Scopus)

    Abstract

    In this paper, thermo-resistive platinum (Pt) thin film sensor, which was produced using Micro Electro Mechanical Systems (MEMS) fabrication techniques, is proposed. The sensor design incorporated resistor elements that would facilitate the temperature-resistance characteristics and mechanisms of Pt based thin film thermo-resistors. Especially, this paper reports the characteristics of a new differential Pt thin film hydrogen gas sensor. The fabricated hydrogen sensor detected the concentration of hydrogen gas in the air from 2% to 10%. It was possible to achieve the correct the heat transfer with this new differential Pt thin film hydrogen gas sensor. The characteristics of sensor's output are higher than conventional ones that we developed.

    Original languageEnglish
    JournalIEEJ Transactions on Sensors and Micromachines
    Volume130
    Issue number3
    DOIs
    Publication statusPublished - 2010

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    Keywords

    • Hydrogen gas sensor
    • Lift-off process
    • MEMS
    • Platinum thin film

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Mechanical Engineering

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