DIFFRACTION EFFECTS ON PATTERN REPLICATION WITH SYNCHROTRON RADIATION.

N. Atoda, H. Kawakatsu, H. Tanino, S. Ichimura, M. Hirata, K. Hoh

Research output: Contribution to journalConference articlepeer-review

17 Citations (Scopus)

Fingerprint

Dive into the research topics of 'DIFFRACTION EFFECTS ON PATTERN REPLICATION WITH SYNCHROTRON RADIATION.'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy