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Diffusion of molecular and atomic oxygen in silicon oxide
Tadatsugu Hoshino*, Masayuki Hata, Saburo Neya, Yasushiro Nishioka, Takanobu Watanabe, Kosuke Tatsumura, Iwao Ohdomari
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
31
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(Scopus)