Diffusion of molecular and atomic oxygen in silicon oxide

Tadatsugu Hoshino*, Masayuki Hata, Saburo Neya, Yasushiro Nishioka, Takanobu Watanabe, Kosuke Tatsumura, Iwao Ohdomari

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

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Engineering & Materials Science

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