Digital integrator in scanning Auger electron microscopy

K. Goto, S. Ichimura, R. Shimizu

Research output: Contribution to journalArticle

Abstract

A digital integration technique based on the use of V/F and D/A converters accompanied by the digital scanning and the synchronous square-wave modulation has been introduced in the scanning Auger electron microscopy. This integrator allows us to perform integration in very high efficiency leading to high signal to noise ratio and to high spatial resolution of the Auger pictures.

Original languageEnglish
Pages (from-to)95-97
Number of pages3
JournalReview of Scientific Instruments
Volume51
Issue number1
DOIs
Publication statusPublished - 1980 Dec 1

ASJC Scopus subject areas

  • Instrumentation

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