Digital integrator in scanning Auger electron microscopy

K. Goto; S. Ichimura; R. Shimizu

doi:10.1063/1.1136027

Digital integrator in scanning Auger electron microscopy

K. Goto, S. Ichimura, R. Shimizu

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Abstract

A digital integration technique based on the use of V/F and D/A converters accompanied by the digital scanning and the synchronous square-wave modulation has been introduced in the scanning Auger electron microscopy. This integrator allows us to perform integration in very high efficiency leading to high signal to noise ratio and to high spatial resolution of the Auger pictures.

Original language	English
Pages (from-to)	95-97
Number of pages	3
Journal	Review of Scientific Instruments
Volume	51
Issue number	1
DOIs	https://doi.org/10.1063/1.1136027
Publication status	Published - 1980 Dec 1

ASJC Scopus subject areas

Instrumentation

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Goto, K., Ichimura, S., & Shimizu, R. (1980). Digital integrator in scanning Auger electron microscopy. Review of Scientific Instruments, 51(1), 95-97. https://doi.org/10.1063/1.1136027

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