Digital integrator in scanning Auger electron microscopy

K. Goto, Shingo Ichimura, R. Shimizu

Research output: Contribution to journalArticle

Abstract

A digital integration technique based on the use of V/F and D/A converters accompanied by the digital scanning and the synchronous square-wave modulation has been introduced in the scanning Auger electron microscopy. This integrator allows us to perform integration in very high efficiency leading to high signal to noise ratio and to high spatial resolution of the Auger pictures.

Original languageEnglish
Pages (from-to)95-97
Number of pages3
JournalReview of Scientific Instruments
Volume51
Issue number1
DOIs
Publication statusPublished - 1980 Dec 1
Externally publishedYes

Fingerprint

digital integrators
Electron microscopy
electron microscopy
Scanning
scanning
square waves
integrators
converters
Signal to noise ratio
signal to noise ratios
spatial resolution
Modulation
modulation
high resolution

ASJC Scopus subject areas

  • Instrumentation

Cite this

Digital integrator in scanning Auger electron microscopy. / Goto, K.; Ichimura, Shingo; Shimizu, R.

In: Review of Scientific Instruments, Vol. 51, No. 1, 01.12.1980, p. 95-97.

Research output: Contribution to journalArticle

@article{be44d95716974e01bbfee1fc18b37fbd,
title = "Digital integrator in scanning Auger electron microscopy",
abstract = "A digital integration technique based on the use of V/F and D/A converters accompanied by the digital scanning and the synchronous square-wave modulation has been introduced in the scanning Auger electron microscopy. This integrator allows us to perform integration in very high efficiency leading to high signal to noise ratio and to high spatial resolution of the Auger pictures.",
author = "K. Goto and Shingo Ichimura and R. Shimizu",
year = "1980",
month = "12",
day = "1",
doi = "10.1063/1.1136027",
language = "English",
volume = "51",
pages = "95--97",
journal = "Review of Scientific Instruments",
issn = "0034-6748",
publisher = "American Institute of Physics Publising LLC",
number = "1",

}

TY - JOUR

T1 - Digital integrator in scanning Auger electron microscopy

AU - Goto, K.

AU - Ichimura, Shingo

AU - Shimizu, R.

PY - 1980/12/1

Y1 - 1980/12/1

N2 - A digital integration technique based on the use of V/F and D/A converters accompanied by the digital scanning and the synchronous square-wave modulation has been introduced in the scanning Auger electron microscopy. This integrator allows us to perform integration in very high efficiency leading to high signal to noise ratio and to high spatial resolution of the Auger pictures.

AB - A digital integration technique based on the use of V/F and D/A converters accompanied by the digital scanning and the synchronous square-wave modulation has been introduced in the scanning Auger electron microscopy. This integrator allows us to perform integration in very high efficiency leading to high signal to noise ratio and to high spatial resolution of the Auger pictures.

UR - http://www.scopus.com/inward/record.url?scp=0018961501&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0018961501&partnerID=8YFLogxK

U2 - 10.1063/1.1136027

DO - 10.1063/1.1136027

M3 - Article

VL - 51

SP - 95

EP - 97

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

SN - 0034-6748

IS - 1

ER -