Dimension optimization for a miniature high-frequency quartz resonatore

Jing Ji, Meng Zhao, Yupeng Zhang, Satoshi Ikezawa, Toshitsugu Ueda

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)

    Abstract

    In this paper, optimal design of a miniature AT-cut high-frequency quartz resonator is presented. This miniature AT-cut high-frequency quartz resonator is about only 25% of the AT-cut high-frequency resonator products in current market. It can be fabricated by our newly developed manufacturing process of MEMS quartz resonator, which cannot be realized by previous mechanical process. A three-dimensional finite element model using linear cuboid-type elements was established to carry out eigen-frequency analysis. To describe quantitatively the spurious coupling strength, we carried out the linear regression analysis to recover the ideal fundamental thickness-shear vibration without spurious vibration coupling, and introduced a parameter named coupling coefficient. To describe quantitatively the energy trapping performance of the resonator, we introduced a parameter named energy trapping rate defined by ratio of vibration energy inside and outside of electrode region. Optimal dimensions of resonator providing small coupling coefficient and large energy trapping rate were determined. The optimization method can certainly be applied in the development of the miniature high-frequency quartz resonators.

    Original languageEnglish
    Title of host publicationIEEE SENSORS 2013 - Proceedings
    DOIs
    Publication statusPublished - 2013
    Event12th IEEE SENSORS 2013 Conference - Baltimore, MD
    Duration: 2013 Nov 42013 Nov 6

    Other

    Other12th IEEE SENSORS 2013 Conference
    CityBaltimore, MD
    Period13/11/413/11/6

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering

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  • Cite this

    Ji, J., Zhao, M., Zhang, Y., Ikezawa, S., & Ueda, T. (2013). Dimension optimization for a miniature high-frequency quartz resonatore. In IEEE SENSORS 2013 - Proceedings [6688411] https://doi.org/10.1109/ICSENS.2013.6688411