Dimension optimization of supporting portion for a high-frequency quartz resonator

Jing Ji, Hiroshi Oigawa, Meng Zhao, Non -Member, Satoshi Ikezawa, Toshitsugu Ueda

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

In this paper, dimension optimization of supporting portion was carried out for an originally designed high-frequency fundamental AT-cut quartz resonator, which has a firstly applied peripheral electrode and 10-μm-thin vibration portion to generate above 150 MHz fundamental thickness-shear vibration. Using three-dimensional finite element modeling, it is the first time; dimensions of supporting portion were optimized through improving energy trapping and reducing vibration couplings. Based on optimization results, resonators with different dimensions were fabricated and their Q-factors were measured. The experimental results were very consistent with the optimization results. Improvement of the resonator's performance ensured the validation of our method.

Original languageEnglish
Pages (from-to)253-259
Number of pages7
JournalIEEJ Transactions on Sensors and Micromachines
Volume133
Issue number9
DOIs
Publication statusPublished - 2013

Keywords

  • Coupling
  • Energy trapping
  • Finite element method
  • High-frequency resonator
  • Optimization
  • Supporting portion

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

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