Direct lithography of rubbery OSTE+ polymer

J. Hansson, Hiroki Yasuga, S. Basak, C. F. Carlborg, W. Van Der Wijngaart, T. Haraldsson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present a Rubbery, Off-Stoichiometric Thiol-Ene-epoxy (OSTE+) polymer for direct lithography manufacturing, demonstrate its use in pneumatic pinch microvalves for lab-on-chip applications, test the lithography process achieving pillars of aspect-ratios (a.r.) 1:8, and characterize it's surface as hydrophilic.

Original languageEnglish
Title of host publication18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014
PublisherChemical and Biological Microsystems Society
Pages123-125
Number of pages3
ISBN (Electronic)9780979806476
Publication statusPublished - 2014 Jan 1
Externally publishedYes
Event18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014 - San Antonio, United States
Duration: 2014 Oct 262014 Oct 30

Publication series

Name18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014

Other

Other18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014
CountryUnited States
CitySan Antonio
Period14/10/2614/10/30

Fingerprint

Lithography
Polymers
Pneumatics
Aspect ratio

Keywords

  • Lab-on-a-chip
  • Microvalve
  • OSTE+
  • PDMS

ASJC Scopus subject areas

  • Control and Systems Engineering

Cite this

Hansson, J., Yasuga, H., Basak, S., Carlborg, C. F., Van Der Wijngaart, W., & Haraldsson, T. (2014). Direct lithography of rubbery OSTE+ polymer. In 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014 (pp. 123-125). (18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014). Chemical and Biological Microsystems Society.

Direct lithography of rubbery OSTE+ polymer. / Hansson, J.; Yasuga, Hiroki; Basak, S.; Carlborg, C. F.; Van Der Wijngaart, W.; Haraldsson, T.

18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014. Chemical and Biological Microsystems Society, 2014. p. 123-125 (18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hansson, J, Yasuga, H, Basak, S, Carlborg, CF, Van Der Wijngaart, W & Haraldsson, T 2014, Direct lithography of rubbery OSTE+ polymer. in 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014. 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014, Chemical and Biological Microsystems Society, pp. 123-125, 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014, San Antonio, United States, 14/10/26.
Hansson J, Yasuga H, Basak S, Carlborg CF, Van Der Wijngaart W, Haraldsson T. Direct lithography of rubbery OSTE+ polymer. In 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014. Chemical and Biological Microsystems Society. 2014. p. 123-125. (18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014).
Hansson, J. ; Yasuga, Hiroki ; Basak, S. ; Carlborg, C. F. ; Van Der Wijngaart, W. ; Haraldsson, T. / Direct lithography of rubbery OSTE+ polymer. 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014. Chemical and Biological Microsystems Society, 2014. pp. 123-125 (18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014).
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