Discharge of viscous UV-curable resin droplets by screen printing for UV nanoimprint lithography

Akira Tanabe, Takuya Uehara, Kazuro Nagase, Hiroaki Ikedo, Nobuya Hiroshiba, Takahiro Nakamura, Masaru Nakagawa

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

We demonstrated a coating method of screen printing for discharging droplets of a high-viscosity resin on a substrate for ultraviolet (UV) nanoimprint lithography (NIL). Compared with a spin-coated resin film on a silicon substrate, discharged resin droplets on a silicon substrate were effective in terms of the uniformity of residual layer thickness (RLT) in contact with a mold with various pattern densities. Fluorescence microscope observations with a fluorescent-dye-containing UV-curable resin enabled the evaluation of the shapes of resin droplets discharged on a substrate surface. Widely used screen mesh plates composed of a stainless mesh covered with a patterned emulsion film caused defects of undischarged parts, whereas defects-free resin droplets with a narrow size distribution were discharged by mesh-free plates prepared with laser ablation. The pitch-to-diameter ratio in the configuration of 10-m-diameter holes needs to be larger than 2.5 times for printing a resin having a viscosity of 12,800mPas.

Original languageEnglish
Article number06GM01
JournalJapanese Journal of Applied Physics
Volume55
Issue number6
DOIs
Publication statusPublished - 2016 Jun 1
Externally publishedYes

Fingerprint

Nanoimprint lithography
Screen printing
printing
Discharge (fluid mechanics)
resins
lithography
Resins
mesh
Substrates
Viscosity
viscosity
Silicon
Defects
defects
silicon
Laser ablation
laser ablation
emulsions
Emulsions
coating

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Discharge of viscous UV-curable resin droplets by screen printing for UV nanoimprint lithography. / Tanabe, Akira; Uehara, Takuya; Nagase, Kazuro; Ikedo, Hiroaki; Hiroshiba, Nobuya; Nakamura, Takahiro; Nakagawa, Masaru.

In: Japanese Journal of Applied Physics, Vol. 55, No. 6, 06GM01, 01.06.2016.

Research output: Contribution to journalArticle

Tanabe, Akira ; Uehara, Takuya ; Nagase, Kazuro ; Ikedo, Hiroaki ; Hiroshiba, Nobuya ; Nakamura, Takahiro ; Nakagawa, Masaru. / Discharge of viscous UV-curable resin droplets by screen printing for UV nanoimprint lithography. In: Japanese Journal of Applied Physics. 2016 ; Vol. 55, No. 6.
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