Dynamic two-frequency interferometry for small displacement measurements

Y. Ohtsuka, M. Tsubokawa

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Two-frequency interferometry for small displacement measurements is examined from a practical point of view. A laser beam that is modulated sinusoidally in intensity by an acousto-optic Bragg cell provides signal and reference optical waves to produce dynamic interference. The output signal of a photodetector receiving the interference is composed of optical homodyne and heterodyne components. The heterodyne component carries a vibrational displacement to be detected on its amplitude. A sinusoidal vibration amplitude is measured down to 0.5 nm.

Original languageEnglish
Pages (from-to)25-29
Number of pages5
JournalOptics and Laser Technology
Volume16
Issue number1
DOIs
Publication statusPublished - 1984 Feb
Externally publishedYes

Keywords

  • Bragg cells
  • dimensional measurement
  • interferometry

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Dynamic two-frequency interferometry for small displacement measurements'. Together they form a unique fingerprint.

  • Cite this