EFFECT OF CARRIER GAS ON STRUCTURE OF PLASMA POLYMERIZED TETRAFLUOROETHYLENE FILMS.

Toshiki Nakano, Yasuhiro Kasama, Yoshimichi Ohki, Kichinosuke Yahagi

    Research output: Chapter in Book/Report/Conference proceedingChapter

    8 Citations (Scopus)

    Abstract

    Thin films were polymerized by introducing tetrafluoroethylene gas into the 'tail-flame' of a glow discharge of hydrogen or argon used as a carried gas. Compared with argon, hydrogen gives a higher deposition rate at low discharge power and a lower rate at high discharge power. ESR, ESCA and IR measurements showed that films polymerized using hydrogen as a carrier gas are crosslinked to a higher degree and have more radicals than those polymerized using argon. The former films have higher tan delta values than the latter films. These results arise from the competing processes of polymerization and ablation in the glow-discharge plasma.

    Original languageEnglish
    Title of host publicationJapanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
    Pages83-86
    Number of pages4
    Volume24
    Edition1
    Publication statusPublished - 1985 Jan

    Fingerprint

    Argon
    Glow discharges
    Plasmas
    Hydrogen
    Gases
    Ablation
    Deposition rates
    Paramagnetic resonance
    Polymerization
    Thin films

    ASJC Scopus subject areas

    • Engineering(all)

    Cite this

    Nakano, T., Kasama, Y., Ohki, Y., & Yahagi, K. (1985). EFFECT OF CARRIER GAS ON STRUCTURE OF PLASMA POLYMERIZED TETRAFLUOROETHYLENE FILMS. In Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes (1 ed., Vol. 24, pp. 83-86)

    EFFECT OF CARRIER GAS ON STRUCTURE OF PLASMA POLYMERIZED TETRAFLUOROETHYLENE FILMS. / Nakano, Toshiki; Kasama, Yasuhiro; Ohki, Yoshimichi; Yahagi, Kichinosuke.

    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes. Vol. 24 1. ed. 1985. p. 83-86.

    Research output: Chapter in Book/Report/Conference proceedingChapter

    Nakano, T, Kasama, Y, Ohki, Y & Yahagi, K 1985, EFFECT OF CARRIER GAS ON STRUCTURE OF PLASMA POLYMERIZED TETRAFLUOROETHYLENE FILMS. in Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes. 1 edn, vol. 24, pp. 83-86.
    Nakano T, Kasama Y, Ohki Y, Yahagi K. EFFECT OF CARRIER GAS ON STRUCTURE OF PLASMA POLYMERIZED TETRAFLUOROETHYLENE FILMS. In Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes. 1 ed. Vol. 24. 1985. p. 83-86
    Nakano, Toshiki ; Kasama, Yasuhiro ; Ohki, Yoshimichi ; Yahagi, Kichinosuke. / EFFECT OF CARRIER GAS ON STRUCTURE OF PLASMA POLYMERIZED TETRAFLUOROETHYLENE FILMS. Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes. Vol. 24 1. ed. 1985. pp. 83-86
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