Effect of introduced fluorine on electrical breakdown characteristics of plasma polymer films

Toshiki Nakano, Masao Fukuyama, Yoshimichi Ohki

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)343-350
Number of pages8
JournalIEEJ Transactions on Fundamentals and Materials
Volume109
Issue number8
DOIs
Publication statusPublished - 1989

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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