Effect of introduced fluorine on electrical breakdown characteristics of plasma polymer films

Toshiki Nakano, Masao Fukuyama, Yoshimichi Ohki

    Research output: Contribution to journalArticle

    1 Citation (Scopus)
    Original languageEnglish
    Pages (from-to)343-350
    Number of pages8
    JournalIEEJ Transactions on Fundamentals and Materials
    Volume109
    Issue number8
    DOIs
    Publication statusPublished - 1989

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    Fluorine
    Polymer films
    Plasmas

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering

    Cite this

    Effect of introduced fluorine on electrical breakdown characteristics of plasma polymer films. / Nakano, Toshiki; Fukuyama, Masao; Ohki, Yoshimichi.

    In: IEEJ Transactions on Fundamentals and Materials, Vol. 109, No. 8, 1989, p. 343-350.

    Research output: Contribution to journalArticle

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