Effect of introduced fluorine on electrical breakdown characteristics of plasma polymer films

Toshiki Nakano, Masao Fukuyama, Yoshimichi Ohki

    Research output: Contribution to journalArticlepeer-review

    1 Citation (Scopus)
    Original languageEnglish
    Pages (from-to)343-350
    Number of pages8
    JournalIEEJ Transactions on Fundamentals and Materials
    Issue number8
    Publication statusPublished - 1989

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering

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