Effect of metal heat guide structure on the performance of planar Si thermoelectric generator embedded in SiO2inter-layer dielectric

Tsubasa Kashizaki; Motohiro Tomita; Kazuaki Katayama; Takumi Hoshina; Takeo Matsuki; Sylvia Yuk Yee Chung; Takanobu Watanabe

doi:10.35848/1347-4065/ac3eb8

Effect of metal heat guide structure on the performance of planar Si thermoelectric generator embedded in SiO₂inter-layer dielectric

Tsubasa Kashizaki^*, Motohiro Tomita, Kazuaki Katayama, Takumi Hoshina, Takeo Matsuki, Sylvia Yuk Yee Chung, Takanobu Watanabe

^*Corresponding author for this work

School of Fundamental Science and Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Heat guide (HG) is a layer providing a heat flux to the desired part in a micro thermoelectric generator (μ-TEG). In this work, we experimentally investigated the impact of the HG structure on the thermoelectric voltage of a cavity-free planer-type Si-nanowire (Si-NW) μ-TEG, which is embedded in SiO2 acting as an inter-layer dielectric (ILD). Although the heat flows also through the ILD, a sub-μm-thick HG is able to selectively guide the heat flux to the hot side terminal of the μ-TEG, and the μ-TEG performance is improved by increasing the thickness of the HG.

Original language	English
Article number	SC1017
Journal	Japanese journal of applied physics
Volume	61
Issue number	SC
DOIs	https://doi.org/10.35848/1347-4065/ac3eb8
Publication status	Published - 2022 May

Keywords

Si nanowire (NW)
heat guide (HG)
thermoelectric (TE) generator

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

Access to Document

10.35848/1347-4065/ac3eb8

Cite this

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title = "Effect of metal heat guide structure on the performance of planar Si thermoelectric generator embedded in SiO2inter-layer dielectric",

abstract = "Heat guide (HG) is a layer providing a heat flux to the desired part in a micro thermoelectric generator (μ-TEG). In this work, we experimentally investigated the impact of the HG structure on the thermoelectric voltage of a cavity-free planer-type Si-nanowire (Si-NW) μ-TEG, which is embedded in SiO2 acting as an inter-layer dielectric (ILD). Although the heat flows also through the ILD, a sub-μm-thick HG is able to selectively guide the heat flux to the hot side terminal of the μ-TEG, and the μ-TEG performance is improved by increasing the thickness of the HG. ",

keywords = "Si nanowire (NW), heat guide (HG), thermoelectric (TE) generator",

author = "Tsubasa Kashizaki and Motohiro Tomita and Kazuaki Katayama and Takumi Hoshina and Takeo Matsuki and Chung, {Sylvia Yuk Yee} and Takanobu Watanabe",

note = "Funding Information: This work was supported by CREST, JST Grant No. JPMJCR19Q5. A part of this work was conducted at NIMS Nanofabrication Platform, supported by “Nanotechnology Platform Program” of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan, Grant No. JPMXP09F20NM0035. Publisher Copyright: {\textcopyright} 2022 The Japan Society of Applied Physics.",

year = "2022",

month = may,

doi = "10.35848/1347-4065/ac3eb8",

language = "English",

volume = "61",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

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AU - Kashizaki, Tsubasa

AU - Tomita, Motohiro

AU - Katayama, Kazuaki

AU - Hoshina, Takumi

AU - Matsuki, Takeo

AU - Chung, Sylvia Yuk Yee

AU - Watanabe, Takanobu

N1 - Funding Information: This work was supported by CREST, JST Grant No. JPMJCR19Q5. A part of this work was conducted at NIMS Nanofabrication Platform, supported by “Nanotechnology Platform Program” of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan, Grant No. JPMXP09F20NM0035. Publisher Copyright: © 2022 The Japan Society of Applied Physics.

PY - 2022/5

Y1 - 2022/5

N2 - Heat guide (HG) is a layer providing a heat flux to the desired part in a micro thermoelectric generator (μ-TEG). In this work, we experimentally investigated the impact of the HG structure on the thermoelectric voltage of a cavity-free planer-type Si-nanowire (Si-NW) μ-TEG, which is embedded in SiO2 acting as an inter-layer dielectric (ILD). Although the heat flows also through the ILD, a sub-μm-thick HG is able to selectively guide the heat flux to the hot side terminal of the μ-TEG, and the μ-TEG performance is improved by increasing the thickness of the HG.

AB - Heat guide (HG) is a layer providing a heat flux to the desired part in a micro thermoelectric generator (μ-TEG). In this work, we experimentally investigated the impact of the HG structure on the thermoelectric voltage of a cavity-free planer-type Si-nanowire (Si-NW) μ-TEG, which is embedded in SiO2 acting as an inter-layer dielectric (ILD). Although the heat flows also through the ILD, a sub-μm-thick HG is able to selectively guide the heat flux to the hot side terminal of the μ-TEG, and the μ-TEG performance is improved by increasing the thickness of the HG.

KW - Si nanowire (NW)

KW - heat guide (HG)

KW - thermoelectric (TE) generator

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