Effect of metal heat guide structure on the performance of planar Si thermoelectric generator embedded in SiO2inter-layer dielectric

Tsubasa Kashizaki*, Motohiro Tomita, Kazuaki Katayama, Takumi Hoshina, Takeo Matsuki, Sylvia Yuk Yee Chung, Takanobu Watanabe

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

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Physics & Astronomy

Engineering & Materials Science