Effect of polar groups on the electrical breakdown strength of plasma polymer films

Toshiki Nakano; Masao Fukuyama; Yoshimichi Ohki

Effect of polar groups on the electrical breakdown strength of plasma polymer films

Toshiki Nakano^*, Masao Fukuyama, Yoshimichi Ohki

^*Corresponding author for this work

Kagami Memorial Research Institute for Materials Science and Technology

Research output: Contribution to conference › Paper › peer-review

Abstract

The electric breakdown field of plasma polymer films was studied by applying rectangular voltage pulses. The breakdown field increases by the incorporation of fluorine atoms into the film when the pulse width is shorter than 5 μs. This is due to the scattering of electronic carriers caused by C-F bonds.

Original language	English
Pages	383-386
Number of pages	4
Publication status	Published - 1988
Event	Proceedings - Second International Conference on Properties and Applications of Dielectric Materials - Beijing, China Duration: 1988 Sep 12 → 1988 Sep 16

Other

Other	Proceedings - Second International Conference on Properties and Applications of Dielectric Materials
City	Beijing, China
Period	88/9/12 → 88/9/16

ASJC Scopus subject areas

Engineering(all)

Cite this

@conference{c44b2615635f4935a82e4691d1e1cace,

title = "Effect of polar groups on the electrical breakdown strength of plasma polymer films",

abstract = "The electric breakdown field of plasma polymer films was studied by applying rectangular voltage pulses. The breakdown field increases by the incorporation of fluorine atoms into the film when the pulse width is shorter than 5 μs. This is due to the scattering of electronic carriers caused by C-F bonds.",

author = "Toshiki Nakano and Masao Fukuyama and Yoshimichi Ohki",

year = "1988",

language = "English",

pages = "383--386",

note = "Proceedings - Second International Conference on Properties and Applications of Dielectric Materials ; Conference date: 12-09-1988 Through 16-09-1988",

}

TY - CONF

T1 - Effect of polar groups on the electrical breakdown strength of plasma polymer films

AU - Nakano, Toshiki

AU - Fukuyama, Masao

AU - Ohki, Yoshimichi

PY - 1988

Y1 - 1988

N2 - The electric breakdown field of plasma polymer films was studied by applying rectangular voltage pulses. The breakdown field increases by the incorporation of fluorine atoms into the film when the pulse width is shorter than 5 μs. This is due to the scattering of electronic carriers caused by C-F bonds.

AB - The electric breakdown field of plasma polymer films was studied by applying rectangular voltage pulses. The breakdown field increases by the incorporation of fluorine atoms into the film when the pulse width is shorter than 5 μs. This is due to the scattering of electronic carriers caused by C-F bonds.

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UR - http://www.scopus.com/inward/citedby.url?scp=0024183727&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0024183727

SP - 383

EP - 386

T2 - Proceedings - Second International Conference on Properties and Applications of Dielectric Materials

Y2 - 12 September 1988 through 16 September 1988

ER -

Effect of polar groups on the electrical breakdown strength of plasma polymer films

Abstract

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ASJC Scopus subject areas

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