Abstract
The electric breakdown field of plasma polymer films was studied by applying rectangular voltage pulses. The breakdown field increases by the incorporation of fluorine atoms into the film when the pulse width is shorter than 5 μs. This is due to the scattering of electronic carriers caused by C-F bonds.
Original language | English |
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Pages | 383-386 |
Number of pages | 4 |
Publication status | Published - 1988 Dec 1 |
Event | Proceedings - Second International Conference on Properties and Applications of Dielectric Materials - Beijing, China Duration: 1988 Sep 12 → 1988 Sep 16 |
Other
Other | Proceedings - Second International Conference on Properties and Applications of Dielectric Materials |
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City | Beijing, China |
Period | 88/9/12 → 88/9/16 |
ASJC Scopus subject areas
- Engineering(all)