Effect of polar groups on the electrical breakdown strength of plasma polymer films

Toshiki Nakano, Masao Fukuyama, Yoshimichi Ohki

Research output: Contribution to conferencePaper

Abstract

The electric breakdown field of plasma polymer films was studied by applying rectangular voltage pulses. The breakdown field increases by the incorporation of fluorine atoms into the film when the pulse width is shorter than 5 μs. This is due to the scattering of electronic carriers caused by C-F bonds.

Original languageEnglish
Pages383-386
Number of pages4
Publication statusPublished - 1988 Dec 1
EventProceedings - Second International Conference on Properties and Applications of Dielectric Materials - Beijing, China
Duration: 1988 Sep 121988 Sep 16

Other

OtherProceedings - Second International Conference on Properties and Applications of Dielectric Materials
CityBeijing, China
Period88/9/1288/9/16

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Nakano, T., Fukuyama, M., & Ohki, Y. (1988). Effect of polar groups on the electrical breakdown strength of plasma polymer films. 383-386. Paper presented at Proceedings - Second International Conference on Properties and Applications of Dielectric Materials, Beijing, China, .