Effect of polar groups on the electrical breakdown strength of plasma polymer films

Toshiki Nakano, Masao Fukuyama, Yoshimichi Ohki

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    The electric breakdown field of plasma polymer films was studied by applying rectangular voltage pulses. The breakdown field increases by the incorporation of fluorine atoms into the film when the pulse width is shorter than 5 μs. This is due to the scattering of electronic carriers caused by C-F bonds.

    Original languageEnglish
    Title of host publicationProc Second Int Conf Prop Appl Dielectr Mater
    Editors Anon
    Place of PublicationPiscataway, NJ, United States
    PublisherPubl by IEEE
    Pages383-386
    Number of pages4
    Publication statusPublished - 1988
    EventProceedings - Second International Conference on Properties and Applications of Dielectric Materials - Beijing, China
    Duration: 1988 Sep 121988 Sep 16

    Other

    OtherProceedings - Second International Conference on Properties and Applications of Dielectric Materials
    CityBeijing, China
    Period88/9/1288/9/16

    Fingerprint

    Electric breakdown
    Fluorine
    Polymer films
    Scattering
    Plasmas
    Atoms
    Electric potential

    ASJC Scopus subject areas

    • Engineering(all)

    Cite this

    Nakano, T., Fukuyama, M., & Ohki, Y. (1988). Effect of polar groups on the electrical breakdown strength of plasma polymer films. In Anon (Ed.), Proc Second Int Conf Prop Appl Dielectr Mater (pp. 383-386). Piscataway, NJ, United States: Publ by IEEE.

    Effect of polar groups on the electrical breakdown strength of plasma polymer films. / Nakano, Toshiki; Fukuyama, Masao; Ohki, Yoshimichi.

    Proc Second Int Conf Prop Appl Dielectr Mater. ed. / Anon. Piscataway, NJ, United States : Publ by IEEE, 1988. p. 383-386.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Nakano, T, Fukuyama, M & Ohki, Y 1988, Effect of polar groups on the electrical breakdown strength of plasma polymer films. in Anon (ed.), Proc Second Int Conf Prop Appl Dielectr Mater. Publ by IEEE, Piscataway, NJ, United States, pp. 383-386, Proceedings - Second International Conference on Properties and Applications of Dielectric Materials, Beijing, China, 88/9/12.
    Nakano T, Fukuyama M, Ohki Y. Effect of polar groups on the electrical breakdown strength of plasma polymer films. In Anon, editor, Proc Second Int Conf Prop Appl Dielectr Mater. Piscataway, NJ, United States: Publ by IEEE. 1988. p. 383-386
    Nakano, Toshiki ; Fukuyama, Masao ; Ohki, Yoshimichi. / Effect of polar groups on the electrical breakdown strength of plasma polymer films. Proc Second Int Conf Prop Appl Dielectr Mater. editor / Anon. Piscataway, NJ, United States : Publ by IEEE, 1988. pp. 383-386
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