Effect of Sc concentration on shear wave velocities in ScAlN films measured by micro-Brillouin scattering technique

Hayato Ichihashi, Takahiko Yanagitani, Masashi Suzuki, Shinji Takayanagi, Mami Matsukawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

Abstract

ScAlN film is attractive for the BAW and SAW resonators because of its large piezoelectric constants compared with AlN and ZnO. However, the shear and longitudinal elastic properties perpendicular to the c-axis, which are required for SAW and BAW analyses, have not been reported. In this study, we measured shear and longitudinal wave velocities propagating perpendicular to the c-axis [vS = (c66/ρ)1/2 and vL = (c11/ρ)1/2] in ScAlN films with various Sc concentrations using micro-Brillouin scattering technique. The shear and longitudinal wave velocities in the Sc0.41Al0.59N films decreased to 69% and 81% of those in a pure AlN film, respectively. The shear wave velocity in the film with Sc concentration more than 50% increased with increasing of Sc concentration.

Original languageEnglish
Title of host publicationIEEE International Ultrasonics Symposium, IUS
PublisherIEEE Computer Society
Pages2521-2524
Number of pages4
ISBN (Electronic)9781479970490
DOIs
Publication statusPublished - 2014 Oct 20
Externally publishedYes
Event2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States
Duration: 2014 Sep 32014 Sep 6

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2014 IEEE International Ultrasonics Symposium, IUS 2014
CountryUnited States
CityChicago
Period14/9/314/9/6

Keywords

  • Acoustic wave properties
  • Brillouin scattering
  • ScAlN film

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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