Effect of Sc concentration on shear wave velocities in ScAlN films measured by micro-Brillouin scattering technique

Hayato Ichihashi; Takahiko Yanagitani; Masashi Suzuki; Shinji Takayanagi; Mami Matsukawa

doi:10.1109/ULTSYM.2014.0629

Effect of Sc concentration on shear wave velocities in ScAlN films measured by micro-Brillouin scattering technique

Hayato Ichihashi^*, Takahiko Yanagitani, Masashi Suzuki, Shinji Takayanagi, Mami Matsukawa

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

17 Citations (Scopus)

Abstract

ScAlN film is attractive for the BAW and SAW resonators because of its large piezoelectric constants compared with AlN and ZnO. However, the shear and longitudinal elastic properties perpendicular to the c-axis, which are required for SAW and BAW analyses, have not been reported. In this study, we measured shear and longitudinal wave velocities propagating perpendicular to the c-axis [v_S = (c₆₆/ρ)^1/2 and v_L = (c₁₁/ρ)^1/2] in ScAlN films with various Sc concentrations using micro-Brillouin scattering technique. The shear and longitudinal wave velocities in the Sc_0.41Al_0.59N films decreased to 69% and 81% of those in a pure AlN film, respectively. The shear wave velocity in the film with Sc concentration more than 50% increased with increasing of Sc concentration.

Original language	English
Title of host publication	IEEE International Ultrasonics Symposium, IUS
Publisher	IEEE Computer Society
Pages	2521-2524
Number of pages	4
ISBN (Electronic)	9781479970490
DOIs	https://doi.org/10.1109/ULTSYM.2014.0629
Publication status	Published - 2014 Oct 20
Externally published	Yes
Event	2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States Duration: 2014 Sept 3 → 2014 Sept 6

Publication series

Name	IEEE International Ultrasonics Symposium, IUS
ISSN (Print)	1948-5719
ISSN (Electronic)	1948-5727

Other

Other	2014 IEEE International Ultrasonics Symposium, IUS 2014
Country/Territory	United States
City	Chicago
Period	14/9/3 → 14/9/6

Keywords

Acoustic wave properties
Brillouin scattering
ScAlN film

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/ULTSYM.2014.0629

Cite this

Ichihashi, H., Yanagitani, T., Suzuki, M., Takayanagi, S., & Matsukawa, M. (2014). Effect of Sc concentration on shear wave velocities in ScAlN films measured by micro-Brillouin scattering technique. In IEEE International Ultrasonics Symposium, IUS (pp. 2521-2524). [6932363] (IEEE International Ultrasonics Symposium, IUS). IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2014.0629

Effect of Sc concentration on shear wave velocities in ScAlN films measured by micro-Brillouin scattering technique. / Ichihashi, Hayato; Yanagitani, Takahiko; Suzuki, Masashi et al.

IEEE International Ultrasonics Symposium, IUS. IEEE Computer Society, 2014. p. 2521-2524 6932363 (IEEE International Ultrasonics Symposium, IUS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ichihashi, H, Yanagitani, T, Suzuki, M, Takayanagi, S & Matsukawa, M 2014, Effect of Sc concentration on shear wave velocities in ScAlN films measured by micro-Brillouin scattering technique. in IEEE International Ultrasonics Symposium, IUS., 6932363, IEEE International Ultrasonics Symposium, IUS, IEEE Computer Society, pp. 2521-2524, 2014 IEEE International Ultrasonics Symposium, IUS 2014, Chicago, United States, 14/9/3. https://doi.org/10.1109/ULTSYM.2014.0629

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title = "Effect of Sc concentration on shear wave velocities in ScAlN films measured by micro-Brillouin scattering technique",

abstract = "ScAlN film is attractive for the BAW and SAW resonators because of its large piezoelectric constants compared with AlN and ZnO. However, the shear and longitudinal elastic properties perpendicular to the c-axis, which are required for SAW and BAW analyses, have not been reported. In this study, we measured shear and longitudinal wave velocities propagating perpendicular to the c-axis [vS = (c66/ρ)1/2 and vL = (c11/ρ)1/2] in ScAlN films with various Sc concentrations using micro-Brillouin scattering technique. The shear and longitudinal wave velocities in the Sc0.41Al0.59N films decreased to 69% and 81% of those in a pure AlN film, respectively. The shear wave velocity in the film with Sc concentration more than 50% increased with increasing of Sc concentration.",

keywords = "Acoustic wave properties, Brillouin scattering, ScAlN film",

author = "Hayato Ichihashi and Takahiko Yanagitani and Masashi Suzuki and Shinji Takayanagi and Mami Matsukawa",

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doi = "10.1109/ULTSYM.2014.0629",

language = "English",

series = "IEEE International Ultrasonics Symposium, IUS",

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AU - Ichihashi, Hayato

AU - Yanagitani, Takahiko

AU - Suzuki, Masashi

AU - Takayanagi, Shinji

AU - Matsukawa, Mami

PY - 2014/10/20

Y1 - 2014/10/20

N2 - ScAlN film is attractive for the BAW and SAW resonators because of its large piezoelectric constants compared with AlN and ZnO. However, the shear and longitudinal elastic properties perpendicular to the c-axis, which are required for SAW and BAW analyses, have not been reported. In this study, we measured shear and longitudinal wave velocities propagating perpendicular to the c-axis [vS = (c66/ρ)1/2 and vL = (c11/ρ)1/2] in ScAlN films with various Sc concentrations using micro-Brillouin scattering technique. The shear and longitudinal wave velocities in the Sc0.41Al0.59N films decreased to 69% and 81% of those in a pure AlN film, respectively. The shear wave velocity in the film with Sc concentration more than 50% increased with increasing of Sc concentration.

AB - ScAlN film is attractive for the BAW and SAW resonators because of its large piezoelectric constants compared with AlN and ZnO. However, the shear and longitudinal elastic properties perpendicular to the c-axis, which are required for SAW and BAW analyses, have not been reported. In this study, we measured shear and longitudinal wave velocities propagating perpendicular to the c-axis [vS = (c66/ρ)1/2 and vL = (c11/ρ)1/2] in ScAlN films with various Sc concentrations using micro-Brillouin scattering technique. The shear and longitudinal wave velocities in the Sc0.41Al0.59N films decreased to 69% and 81% of those in a pure AlN film, respectively. The shear wave velocity in the film with Sc concentration more than 50% increased with increasing of Sc concentration.

KW - Acoustic wave properties

KW - Brillouin scattering

KW - ScAlN film

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Effect of Sc concentration on shear wave velocities in ScAlN films measured by micro-Brillouin scattering technique

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