Effect of sputtering geometry on (112̄0) textured ZnO piezofilm

Yoshinori Miyamoto; Takahiko Yanagitani; Mami Matsukawa; Yoshiaki Watanabe

doi:10.1250/ast.27.53

Effect of sputtering geometry on (112̄0) textured ZnO piezofilm

Yoshinori Miyamoto^*, Takahiko Yanagitani, Mami Matsukawa, Yoshiaki Watanabe

^*Corresponding author for this work

Research output: Contribution to journal › Review article › peer-review

5 Citations (Scopus)

Abstract

The effects of sputtering geometry on (112̄0) textured ZnO piezofilm were analyzed. The ZnO film was fabricated using a conventional RF magnetron sputtering apparatus. The crystallite alignment in the substrate normal direction was estimated using the full width half maximum (FWHM) of the ω-scan rocking curve. The results show that crystallites alignment and film thickness are strongly affected by the substrate position, despite that the other sputtering conditions are identical.

Original language	English
Pages (from-to)	53-55
Number of pages	3
Journal	Acoustical Science and Technology
Volume	27
Issue number	1
DOIs	https://doi.org/10.1250/ast.27.53
Publication status	Published - 2006
Externally published	Yes

Keywords

Crystallite alignment
Piezoelectric film
Sputtering
Zinc oxide

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1250/ast.27.53

Cite this

@article{be546c7858584c879f63555afcb8aae6,

title = "Effect of sputtering geometry on (11{\=2}0) textured ZnO piezofilm",

abstract = "The effects of sputtering geometry on (11{\=2}0) textured ZnO piezofilm were analyzed. The ZnO film was fabricated using a conventional RF magnetron sputtering apparatus. The crystallite alignment in the substrate normal direction was estimated using the full width half maximum (FWHM) of the ω-scan rocking curve. The results show that crystallites alignment and film thickness are strongly affected by the substrate position, despite that the other sputtering conditions are identical.",

keywords = "Crystallite alignment, Piezoelectric film, Sputtering, Zinc oxide",

author = "Yoshinori Miyamoto and Takahiko Yanagitani and Mami Matsukawa and Yoshiaki Watanabe",

year = "2006",

doi = "10.1250/ast.27.53",

language = "English",

volume = "27",

pages = "53--55",

journal = "Journal of the Acoustical Society of Japan (E) (English translation of Nippon Onkyo Gakkaishi)",

issn = "1346-3969",

publisher = "Acoustical Society of Japan",

number = "1",

}

TY - JOUR

T1 - Effect of sputtering geometry on (112̄0) textured ZnO piezofilm

AU - Miyamoto, Yoshinori

AU - Yanagitani, Takahiko

AU - Matsukawa, Mami

AU - Watanabe, Yoshiaki

PY - 2006

Y1 - 2006

N2 - The effects of sputtering geometry on (112̄0) textured ZnO piezofilm were analyzed. The ZnO film was fabricated using a conventional RF magnetron sputtering apparatus. The crystallite alignment in the substrate normal direction was estimated using the full width half maximum (FWHM) of the ω-scan rocking curve. The results show that crystallites alignment and film thickness are strongly affected by the substrate position, despite that the other sputtering conditions are identical.

AB - The effects of sputtering geometry on (112̄0) textured ZnO piezofilm were analyzed. The ZnO film was fabricated using a conventional RF magnetron sputtering apparatus. The crystallite alignment in the substrate normal direction was estimated using the full width half maximum (FWHM) of the ω-scan rocking curve. The results show that crystallites alignment and film thickness are strongly affected by the substrate position, despite that the other sputtering conditions are identical.

KW - Crystallite alignment

KW - Piezoelectric film

KW - Sputtering

KW - Zinc oxide

UR - http://www.scopus.com/inward/record.url?scp=29744462389&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=29744462389&partnerID=8YFLogxK

U2 - 10.1250/ast.27.53

DO - 10.1250/ast.27.53

M3 - Review article

AN - SCOPUS:29744462389

SN - 1346-3969

VL - 27

SP - 53

EP - 55

JO - Journal of the Acoustical Society of Japan (E) (English translation of Nippon Onkyo Gakkaishi)

JF - Journal of the Acoustical Society of Japan (E) (English translation of Nippon Onkyo Gakkaishi)

IS - 1

ER -

Effect of sputtering geometry on (112̄0) textured ZnO piezofilm

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this