EFFECT OF SUBSTRATE TEMPERATURE ON COMPOSITION RATIO X IN MOLECULAR-BEAM-EPITAXIAL GaAs//1// minus //xP//x.

Shun ichi Gonda*, Yuichi Matsushima

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)

Abstract

GaAs//1// minus //xP//x crystals were grown by molecular-beam epitaxy with parametric variation of substrate temperature T//s (540-580 degree C) and of the ratio of beam intensity of P to that of As (2-11). The rate of decrease of composition ratio x with temperature, minus dx/dT//s, is 0. 003 degree C** minus **1 for all ratios of beam intensity. The sticking coefficient of P is found to vary inversely proportional to the substrate temperature in this temperature range. This fact indicates the possibility of writing two-dimensional patterns on the surface by a partial temperature rise.

Original languageEnglish
Pages (from-to)4198-4200
Number of pages3
JournalJournal of Applied Physics
Volume47
Issue number9
DOIs
Publication statusPublished - 1976 Sept
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Physics and Astronomy (miscellaneous)

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