Effect of surface segregation on angular distributions of atoms sputtered from binary alloys

The angular distribution of atoms sputtered from binary alloys (Cu/Ni, Co/Ni, and Fe/Ni) were investigated in relation to the surface segregation phenomenon of one component of the alloys. For the Cu/Ni alloy which has a tendency of strong Cu segregation at the alloy surface, the preferred Ni ejection was observed in the direction of target normal under the sputtering at both RT and 300°C. The preferred Co ejection in target normal directions was clearly discerned only at 300°C for the sputtering of the Co/Ni alloy, while no distinct preferred ejection of one component was observed for the Fe/Ni alloy.