Abstract
The angular distribution of atoms sputtered from binary alloys (Cu/Ni, Co/Ni, and Fe/Ni) were investigated in relation to the surface segregation phenomenon of one component of the alloys. For the Cu/Ni alloy which has a tendency of strong Cu segregation at the alloy surface, the preferred Ni ejection was observed in the direction of target normal under the sputtering at both RT and 300°C. The preferred Co ejection in target normal directions was clearly discerned only at 300°C for the sputtering of the Co/Ni alloy, while no distinct preferred ejection of one component was observed for the Fe/Ni alloy.
| Original language | English |
|---|---|
| Pages (from-to) | 601-604 |
| Number of pages | 4 |
| Journal | Journal of Nuclear Materials |
| Volume | 128-129 |
| Issue number | C |
| DOIs | |
| Publication status | Published - 1984 Jan 1 |
| Externally published | Yes |
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Keywords
- angular distribution
- Co/Ni
- Cu/Ni
- Fe/Ni
- segregation
- sputtering
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Materials Science(all)
- Nuclear Energy and Engineering
Cite this
Effect of surface segregation on angular distributions of atoms sputtered from binary alloys. / Ichimura, Shingo; Shimizu, Hazime; Murakami, Hiroshi; Yoichi, Ishida.
In: Journal of Nuclear Materials, Vol. 128-129, No. C, 01.01.1984, p. 601-604.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Effect of surface segregation on angular distributions of atoms sputtered from binary alloys
AU - Ichimura, Shingo
AU - Shimizu, Hazime
AU - Murakami, Hiroshi
AU - Yoichi, Ishida
PY - 1984/1/1
Y1 - 1984/1/1
N2 - The angular distribution of atoms sputtered from binary alloys (Cu/Ni, Co/Ni, and Fe/Ni) were investigated in relation to the surface segregation phenomenon of one component of the alloys. For the Cu/Ni alloy which has a tendency of strong Cu segregation at the alloy surface, the preferred Ni ejection was observed in the direction of target normal under the sputtering at both RT and 300°C. The preferred Co ejection in target normal directions was clearly discerned only at 300°C for the sputtering of the Co/Ni alloy, while no distinct preferred ejection of one component was observed for the Fe/Ni alloy.
AB - The angular distribution of atoms sputtered from binary alloys (Cu/Ni, Co/Ni, and Fe/Ni) were investigated in relation to the surface segregation phenomenon of one component of the alloys. For the Cu/Ni alloy which has a tendency of strong Cu segregation at the alloy surface, the preferred Ni ejection was observed in the direction of target normal under the sputtering at both RT and 300°C. The preferred Co ejection in target normal directions was clearly discerned only at 300°C for the sputtering of the Co/Ni alloy, while no distinct preferred ejection of one component was observed for the Fe/Ni alloy.
KW - angular distribution
KW - Co/Ni
KW - Cu/Ni
KW - Fe/Ni
KW - segregation
KW - sputtering
UR - http://www.scopus.com/inward/record.url?scp=0021584107&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0021584107&partnerID=8YFLogxK
U2 - 10.1016/0022-3115(84)90419-7
DO - 10.1016/0022-3115(84)90419-7
M3 - Article
AN - SCOPUS:0021584107
VL - 128-129
SP - 601
EP - 604
JO - Journal of Nuclear Materials
JF - Journal of Nuclear Materials
SN - 0022-3115
IS - C
ER -