Effects of Al 2O 3 films on the reliability of Au/Al joint

Atsuko Tsuge, Tomohiro Uno, Kaoru Mizuno, Kohei Tatsumi

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Effects of Al 2O 3 films in the system of Au/Al joint widely used in semi-conductor devices at present have been studied. In the experiment, a thin film of Au/Al 2O 3/Al was used, and the diffusion of Au atoms across through Al 2O 3 films and the formation of intermetallic compound at temperatures between 25°C and 500°C were observed by using Auger electron spectroscopy, X-ray photoelectron spectroscopy, electric resistance measurement and secondary ion mass spectrometer with using 18O as a tracer. It has been cleared from test results that, (1) Au diffuses through Al 2O 3 films and reacts to Al, (2) as temperature rises up, the intermetallic compound grows in an island formation for Au/Al 2O 3/Al system, and (3) the behavior of its growth varies with the presence of oxygen in the atmosphere applied. On the basis of the above results, the effects of Al 2O 3 films on the reliability of Au/Al joint are discussed in this paper.

Original languageEnglish
Pages (from-to)95-101
Number of pages7
JournalNippon Steel Technical Report
Issue number72
Publication statusPublished - 1997 Jan
Externally publishedYes

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Intermetallics
Electric resistance measurement
Mass spectrometers
Auger electron spectroscopy
Semiconductor devices
X ray photoelectron spectroscopy
Ions
Oxygen
Thin films
Atoms
Temperature
Experiments

ASJC Scopus subject areas

  • Metals and Alloys

Cite this

Effects of Al 2O 3 films on the reliability of Au/Al joint. / Tsuge, Atsuko; Uno, Tomohiro; Mizuno, Kaoru; Tatsumi, Kohei.

In: Nippon Steel Technical Report, No. 72, 01.1997, p. 95-101.

Research output: Contribution to journalArticle

Tsuge, Atsuko ; Uno, Tomohiro ; Mizuno, Kaoru ; Tatsumi, Kohei. / Effects of Al 2O 3 films on the reliability of Au/Al joint. In: Nippon Steel Technical Report. 1997 ; No. 72. pp. 95-101.
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