Effects of cluster size on calculation of activation energies of silicon surface reactions with H2 and HCl

Nílson Kunioshi*, Keisuke Anzai, Harunobu Ushijima, Akio Fuwa

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds