Effects of ion implantation and thermal annealing on the photoluminescence in amorphous silicon nitride

Kwang Soo Seol, Tsuyoshi Futami, Takashi Watanabe, Yoshimichi Ohki, Makoto Takiyama

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The effects of thermal annealing and ion implantation on the photoluminescence (PL) in amorphous silicon nitride (a-SiNx) prepared by low-pressure chemical vapor deposition (LPCVD) are investigated. A broad PL band centered at 2.4 eV, consisting of two component PL bands at 2.66 and 2.15 eV, is observed in the as-deposited sample. The PL intensity is found to decrease if the film is thermally annealed, while the decreased PL intensity of the ion-implanted film recovers by the thermal annealing. Based on these results, it is shown that the defects generated by hydrogen release or bond breaking act as nonradiative recombination centers that quench the PL.

Original languageEnglish
Pages (from-to)6746-6750
Number of pages5
JournalJournal of Applied Physics
Issue number9
Publication statusPublished - 1999 May 1


ASJC Scopus subject areas

  • Physics and Astronomy(all)

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