Effects of negative oxygen ions generated during Sc ingot sputtering on electromechanical coupling of ScAlN film

Sliinji Takayanagi, Takahiko Yanagitani

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    ScAlN films are well-researched for GHz acoustic wave devices. Large-area growth techniques of ScAlN films are necessary for the practical application. A single sputtering source with a ScAl alloy metal target is suitable for the film growth from the point of view of the composition stability. However, it is difficult to alloy Al with Sc in the large-size target. Therefore, a mosaic target of Sc and Al metals is reasonable for the large-area growth. In previous study, we demonstrated Sc ingot sputtering deposition [1] in which Sc ingots were set on an Al metal target as similar conditions with the mosaic target. Oxidization of Sc ingots was seriously problem in this method because the c-axis orientation of ScAlN films was degraded by bombardment with O-negative ions generated from the target. In this study, we investigated the effects of the negative ion bombardment on the crystalline orientations and piezoelectric properties.

    Original languageEnglish
    Title of host publication2017 IEEE International Ultrasonics Symposium, IUS 2017
    PublisherIEEE Computer Society
    ISBN (Electronic)9781538633830
    DOIs
    Publication statusPublished - 2017 Oct 31
    Event2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
    Duration: 2017 Sep 62017 Sep 9

    Other

    Other2017 IEEE International Ultrasonics Symposium, IUS 2017
    CountryUnited States
    CityWashington
    Period17/9/617/9/9

    Fingerprint

    ingots
    oxygen ions
    negative ions
    sputtering
    bombardment
    metals
    acoustics

    ASJC Scopus subject areas

    • Acoustics and Ultrasonics

    Cite this

    Takayanagi, S., & Yanagitani, T. (2017). Effects of negative oxygen ions generated during Sc ingot sputtering on electromechanical coupling of ScAlN film. In 2017 IEEE International Ultrasonics Symposium, IUS 2017 [8092666] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2017.8092666

    Effects of negative oxygen ions generated during Sc ingot sputtering on electromechanical coupling of ScAlN film. / Takayanagi, Sliinji; Yanagitani, Takahiko.

    2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 2017. 8092666.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Takayanagi, S & Yanagitani, T 2017, Effects of negative oxygen ions generated during Sc ingot sputtering on electromechanical coupling of ScAlN film. in 2017 IEEE International Ultrasonics Symposium, IUS 2017., 8092666, IEEE Computer Society, 2017 IEEE International Ultrasonics Symposium, IUS 2017, Washington, United States, 17/9/6. https://doi.org/10.1109/ULTSYM.2017.8092666
    Takayanagi S, Yanagitani T. Effects of negative oxygen ions generated during Sc ingot sputtering on electromechanical coupling of ScAlN film. In 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society. 2017. 8092666 https://doi.org/10.1109/ULTSYM.2017.8092666
    Takayanagi, Sliinji ; Yanagitani, Takahiko. / Effects of negative oxygen ions generated during Sc ingot sputtering on electromechanical coupling of ScAlN film. 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 2017.
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