Effects of substrate heating and biasing on nanostructural evolution of nonepitaxially grown TiN nanofilms

T. Q. Li; S. Noda; F. Okada; H. Komiyama

doi:10.1116/1.1621654

Effects of substrate heating and biasing on nanostructural evolution of nonepitaxially grown TiN nanofilms

T. Q. Li^*, S. Noda, F. Okada, H. Komiyama

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Original language	English
Pages (from-to)	2512-2516
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	6
DOIs	https://doi.org/10.1116/1.1621654
Publication status	Published - 2003
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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@article{b91a0d4a29e346808862ec83388bf59a,

title = "Effects of substrate heating and biasing on nanostructural evolution of nonepitaxially grown TiN nanofilms",

author = "Li, {T. Q.} and S. Noda and F. Okada and H. Komiyama",

year = "2003",

doi = "10.1116/1.1621654",

language = "English",

volume = "21",

pages = "2512--2516",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

number = "6",

}

TY - JOUR

T1 - Effects of substrate heating and biasing on nanostructural evolution of nonepitaxially grown TiN nanofilms

AU - Li, T. Q.

AU - Noda, S.

AU - Okada, F.

AU - Komiyama, H.

PY - 2003

Y1 - 2003

UR - http://www.scopus.com/inward/record.url?scp=0942289259&partnerID=8YFLogxK

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U2 - 10.1116/1.1621654

DO - 10.1116/1.1621654

M3 - Article

AN - SCOPUS:0942289259

VL - 21

SP - 2512

EP - 2516

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

SN - 1071-1023

IS - 6

ER -

Effects of substrate heating and biasing on nanostructural evolution of nonepitaxially grown TiN nanofilms

ASJC Scopus subject areas

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