Effects of substrate heating and biasing on nanostructural evolution of nonepitaxially grown TiN nanofilms

T. Q. Li, S. Noda, F. Okada, H. Komiyama

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	2512-2516
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	6
DOIs	https://doi.org/10.1116/1.1621654
Publication status	Published - 2003
Externally published	Yes

ASJC Scopus subject areas

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AU - Li, T. Q.

AU - Noda, S.

AU - Okada, F.

AU - Komiyama, H.

PY - 2003

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JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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