@article{b91a0d4a29e346808862ec83388bf59a,
title = "Effects of substrate heating and biasing on nanostructural evolution of nonepitaxially grown TiN nanofilms",
author = "Li, {T. Q.} and S. Noda and F. Okada and H. Komiyama",
note = "Copyright: Copyright 2020 Elsevier B.V., All rights reserved.",
year = "2003",
doi = "10.1116/1.1621654",
language = "English",
volume = "21",
pages = "2512--2516",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
number = "6",
}