EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes

Daisuke Wakui, Naoki Imai, Yasuhiro Nagaura, Hironobu Sato, Tetsushi Sekiguchi, Satoshi Konishi, Shuichi Sholil, Takayuki Homma

Research output: Contribution to journalConference article

5 Citations (Scopus)


This paper presents the EHD (electro-hydrodynamic) micro pump using 3-D carbon mesh electrodes. The carbon electrodes were fabricated by pyrolysis of SU-8 micro mesh structures [1]. Low temperature SU-8 bonding method under 90°C was developed to realize wafer level carbon structure packaging. The pumping behaviors were evaluated using fluorinert as a sample solution. The maximum pressure and volume flow rate are about 23Pa and 400nL/min under applied voltage of 500V.

Original languageEnglish
Article number4805428
Pages (from-to)499-502
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 2009 Jun 1
Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
Duration: 2009 Jan 252009 Jan 29


ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this