EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes

Daisuke Wakui; Naoki Imai; Yasuhiro Nagaura; Hironobu Sato; Tetsushi Sekiguchi; Satoshi Konishi; Shuichi Sholil; Takayuki Homma

doi:10.1109/MEMSYS.2009.4805428

EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes

Daisuke Wakui, Naoki Imai, Yasuhiro Nagaura, Hironobu Sato, Tetsushi Sekiguchi, Satoshi Konishi, Shuichi Sholil, Takayuki Homma

Research output: Contribution to journal › Conference article

5 Citations (Scopus)

Abstract

This paper presents the EHD (electro-hydrodynamic) micro pump using 3-D carbon mesh electrodes. The carbon electrodes were fabricated by pyrolysis of SU-8 micro mesh structures [1]. Low temperature SU-8 bonding method under 90°C was developed to realize wafer level carbon structure packaging. The pumping behaviors were evaluated using fluorinert as a sample solution. The maximum pressure and volume flow rate are about 23Pa and 400nL/min under applied voltage of 500V.

Original language	English
Article number	4805428
Pages (from-to)	499-502
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2009.4805428
Publication status	Published - 2009 Jun 1
Event	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: 2009 Jan 25 → 2009 Jan 29

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ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

Wakui, D., Imai, N., Nagaura, Y., Sato, H., Sekiguchi, T., Konishi, S., Sholil, S., & Homma, T. (2009). EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 499-502. [4805428]. https://doi.org/10.1109/MEMSYS.2009.4805428

EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes. / Wakui, Daisuke; Imai, Naoki; Nagaura, Yasuhiro; Sato, Hironobu; Sekiguchi, Tetsushi; Konishi, Satoshi; Sholil, Shuichi; Homma, Takayuki.

In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 01.06.2009, p. 499-502.

Research output: Contribution to journal › Conference article

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10.1109/MEMSYS.2009.4805428