EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes

Daisuke Wakui; Naoki Imai; Yasuhiro Nagaura; Hironobu Sato; Tetsushi Sekiguchi; Satoshi Konishi; Shuichi Sholil; Takayuki Homma

doi:10.1109/MEMSYS.2009.4805428

EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes

Daisuke Wakui, Naoki Imai, Yasuhiro Nagaura, Hironobu Sato, Tetsushi Sekiguchi, Satoshi Konishi, Shuichi Sholil, Takayuki Homma

Research output: Contribution to journal › Conference article

5 Citations (Scopus)

Abstract

This paper presents the EHD (electro-hydrodynamic) micro pump using 3-D carbon mesh electrodes. The carbon electrodes were fabricated by pyrolysis of SU-8 micro mesh structures [1]. Low temperature SU-8 bonding method under 90°C was developed to realize wafer level carbon structure packaging. The pumping behaviors were evaluated using fluorinert as a sample solution. The maximum pressure and volume flow rate are about 23Pa and 400nL/min under applied voltage of 500V.

Original language	English
Article number	4805428
Pages (from-to)	499-502
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2009.4805428
Publication status	Published - 2009
Event	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: 2009 Jan 25 → 2009 Jan 29

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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Wakui, D., Imai, N., Nagaura, Y., Sato, H., Sekiguchi, T., Konishi, S., Sholil, S., & Homma, T. (2009). EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 499-502. [4805428]. https://doi.org/10.1109/MEMSYS.2009.4805428

EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes. / Wakui, Daisuke; Imai, Naoki; Nagaura, Yasuhiro; Sato, Hironobu; Sekiguchi, Tetsushi; Konishi, Satoshi; Sholil, Shuichi; Homma, Takayuki.

In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2009, p. 499-502.

Research output: Contribution to journal › Conference article

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abstract = "This paper presents the EHD (electro-hydrodynamic) micro pump using 3-D carbon mesh electrodes. The carbon electrodes were fabricated by pyrolysis of SU-8 micro mesh structures [1]. Low temperature SU-8 bonding method under 90°C was developed to realize wafer level carbon structure packaging. The pumping behaviors were evaluated using fluorinert as a sample solution. The maximum pressure and volume flow rate are about 23Pa and 400nL/min under applied voltage of 500V.",

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