EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes

Daisuke Wakui, Naoki Imai, Yasuhiro Nagaura, Hironobu Sato, Tetsushi Sekiguchi, Satoshi Konishi, Shuichi Sholil, Takayuki Homma

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

This paper presents the EHD (electro-hydrodynamic) micro pump using 3-D carbon mesh electrodes. The carbon electrodes were fabricated by pyrolysis of SU-8 micro mesh structures [1]. Low temperature SU-8 bonding method under 90°C was developed to realize wafer level carbon structure packaging. The pumping behaviors were evaluated using fluorinert as a sample solution. The maximum pressure and volume flow rate are about 23Pa and 400nL/min under applied voltage of 500V.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages499-502
Number of pages4
DOIs
Publication statusPublished - 2009
Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
Duration: 2009 Jan 252009 Jan 29

Other

Other22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009
CountryItaly
CitySorrento
Period09/1/2509/1/29

Fingerprint

mesh
Polymers
Carbon
Hydrodynamics
hydrodynamics
Pumps
pumps
Electrodes
electrodes
carbon
polymers
packaging
pyrolysis
Packaging
pumping
Pyrolysis
flow velocity
Flow rate
wafers
Electric potential

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Wakui, D., Imai, N., Nagaura, Y., Sato, H., Sekiguchi, T., Konishi, S., ... Homma, T. (2009). EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 499-502). [4805428] https://doi.org/10.1109/MEMSYS.2009.4805428

EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes. / Wakui, Daisuke; Imai, Naoki; Nagaura, Yasuhiro; Sato, Hironobu; Sekiguchi, Tetsushi; Konishi, Satoshi; Sholil, Shuichi; Homma, Takayuki.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2009. p. 499-502 4805428.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Wakui, D, Imai, N, Nagaura, Y, Sato, H, Sekiguchi, T, Konishi, S, Sholil, S & Homma, T 2009, EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 4805428, pp. 499-502, 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009, Sorrento, Italy, 09/1/25. https://doi.org/10.1109/MEMSYS.2009.4805428
Wakui D, Imai N, Nagaura Y, Sato H, Sekiguchi T, Konishi S et al. EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2009. p. 499-502. 4805428 https://doi.org/10.1109/MEMSYS.2009.4805428
Wakui, Daisuke ; Imai, Naoki ; Nagaura, Yasuhiro ; Sato, Hironobu ; Sekiguchi, Tetsushi ; Konishi, Satoshi ; Sholil, Shuichi ; Homma, Takayuki. / EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2009. pp. 499-502
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