Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection

Kazuhiro Takahashi; Toshinori Fujie; Reina Teramoto; Isao Takahashi; Nobutaka Sato; Shinji Takeoka; Kazuaki Sawada

doi:10.1557/mrc.2019.11

Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection

Kazuhiro Takahashi, Toshinori Fujie, Reina Teramoto, Isao Takahashi, Nobutaka Sato, Shinji Takeoka, Kazuaki Sawada

School of Advanced Science and Engineering

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

We developed a microelectromechanical-system optical interferometer based on an elastomer nanosheet using a polystyrene-polybutadiene-polystyrene (SBS) triblock copolymer for a suspended membrane as a way to improve the stress sensitivity for surface stress detection. The elastomeric SBS nanosheet provides a low Young's modulus of 28 ± 11 MPa, a large elastic strain of 24 ± 12%, and high adhesiveness, of which the surface charge and mechanical property are tunable by layer-by-layer (LbL) deposition of polysaccharides. A freestanding SBS nanosheet can be formed above a microcavity using a dry transfer technique without applying vacuum or higherature processes. The maximum deflection associated with molecular adsorption increased by sevenfold compared with a parylene-C-based optical interferometric transducer.

Original language	English
Pages (from-to)	381-389
Number of pages	9
Journal	MRS Communications
Volume	9
Issue number	1
DOIs	https://doi.org/10.1557/mrc.2019.11
Publication status	Published - 2019 Mar 1

ASJC Scopus subject areas

Materials Science(all)

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Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection. / Takahashi, Kazuhiro; Fujie, Toshinori; Teramoto, Reina; Takahashi, Isao; Sato, Nobutaka; Takeoka, Shinji; Sawada, Kazuaki.

In: MRS Communications, Vol. 9, No. 1, 01.03.2019, p. 381-389.

Research output: Contribution to journal › Article › peer-review

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abstract = "We developed a microelectromechanical-system optical interferometer based on an elastomer nanosheet using a polystyrene-polybutadiene-polystyrene (SBS) triblock copolymer for a suspended membrane as a way to improve the stress sensitivity for surface stress detection. The elastomeric SBS nanosheet provides a low Young's modulus of 28 ± 11 MPa, a large elastic strain of 24 ± 12%, and high adhesiveness, of which the surface charge and mechanical property are tunable by layer-by-layer (LbL) deposition of polysaccharides. A freestanding SBS nanosheet can be formed above a microcavity using a dry transfer technique without applying vacuum or higherature processes. The maximum deflection associated with molecular adsorption increased by sevenfold compared with a parylene-C-based optical interferometric transducer.",

author = "Kazuhiro Takahashi and Toshinori Fujie and Reina Teramoto and Isao Takahashi and Nobutaka Sato and Shinji Takeoka and Kazuaki Sawada",

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