Abstract
We developed a microelectromechanical-system optical interferometer based on an elastomer nanosheet using a polystyrene-polybutadiene-polystyrene (SBS) triblock copolymer for a suspended membrane as a way to improve the stress sensitivity for surface stress detection. The elastomeric SBS nanosheet provides a low Young's modulus of 28 ± 11 MPa, a large elastic strain of 24 ± 12%, and high adhesiveness, of which the surface charge and mechanical property are tunable by layer-by-layer (LbL) deposition of polysaccharides. A freestanding SBS nanosheet can be formed above a microcavity using a dry transfer technique without applying vacuum or high-temperature processes. The maximum deflection associated with molecular adsorption increased by sevenfold compared with a parylene-C-based optical interferometric transducer.
| Original language | English |
|---|---|
| Journal | MRS Communications |
| DOIs | |
| Publication status | Published - 2019 Jan 1 |
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ASJC Scopus subject areas
- Materials Science(all)
Cite this
Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection. / Takahashi, Kazuhiro; Fujie, Toshinori; Teramoto, Reina; Takahashi, Isao; Sato, Nobutaka; Takeoka, Shinji; Sawada, Kazuaki.
In: MRS Communications, 01.01.2019.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection
AU - Takahashi, Kazuhiro
AU - Fujie, Toshinori
AU - Teramoto, Reina
AU - Takahashi, Isao
AU - Sato, Nobutaka
AU - Takeoka, Shinji
AU - Sawada, Kazuaki
PY - 2019/1/1
Y1 - 2019/1/1
N2 - We developed a microelectromechanical-system optical interferometer based on an elastomer nanosheet using a polystyrene-polybutadiene-polystyrene (SBS) triblock copolymer for a suspended membrane as a way to improve the stress sensitivity for surface stress detection. The elastomeric SBS nanosheet provides a low Young's modulus of 28 ± 11 MPa, a large elastic strain of 24 ± 12%, and high adhesiveness, of which the surface charge and mechanical property are tunable by layer-by-layer (LbL) deposition of polysaccharides. A freestanding SBS nanosheet can be formed above a microcavity using a dry transfer technique without applying vacuum or high-temperature processes. The maximum deflection associated with molecular adsorption increased by sevenfold compared with a parylene-C-based optical interferometric transducer.
AB - We developed a microelectromechanical-system optical interferometer based on an elastomer nanosheet using a polystyrene-polybutadiene-polystyrene (SBS) triblock copolymer for a suspended membrane as a way to improve the stress sensitivity for surface stress detection. The elastomeric SBS nanosheet provides a low Young's modulus of 28 ± 11 MPa, a large elastic strain of 24 ± 12%, and high adhesiveness, of which the surface charge and mechanical property are tunable by layer-by-layer (LbL) deposition of polysaccharides. A freestanding SBS nanosheet can be formed above a microcavity using a dry transfer technique without applying vacuum or high-temperature processes. The maximum deflection associated with molecular adsorption increased by sevenfold compared with a parylene-C-based optical interferometric transducer.
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UR - http://www.scopus.com/inward/citedby.url?scp=85062232868&partnerID=8YFLogxK
U2 - 10.1557/mrc.2019.11
DO - 10.1557/mrc.2019.11
M3 - Article
JO - MRS Communications
JF - MRS Communications
SN - 2159-6859
ER -