Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection

Kazuhiro Takahashi, Toshinori Fujie, Reina Teramoto, Isao Takahashi, Nobutaka Sato, Shinji Takeoka, Kazuaki Sawada

Research output: Contribution to journalArticle

Abstract

We developed a microelectromechanical-system optical interferometer based on an elastomer nanosheet using a polystyrene-polybutadiene-polystyrene (SBS) triblock copolymer for a suspended membrane as a way to improve the stress sensitivity for surface stress detection. The elastomeric SBS nanosheet provides a low Young's modulus of 28 ± 11 MPa, a large elastic strain of 24 ± 12%, and high adhesiveness, of which the surface charge and mechanical property are tunable by layer-by-layer (LbL) deposition of polysaccharides. A freestanding SBS nanosheet can be formed above a microcavity using a dry transfer technique without applying vacuum or high-temperature processes. The maximum deflection associated with molecular adsorption increased by sevenfold compared with a parylene-C-based optical interferometric transducer.

Original languageEnglish
JournalMRS Communications
DOIs
Publication statusPublished - 2019 Jan 1

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Elastomers
MOEMS
Nanosheets
Transducers
Polystyrenes
Microcavities
Polybutadienes
Surface charge
Polysaccharides
Interferometers
Block copolymers
MEMS
Elastic moduli
Vacuum
Membranes
Adsorption
Mechanical properties
Temperature

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection. / Takahashi, Kazuhiro; Fujie, Toshinori; Teramoto, Reina; Takahashi, Isao; Sato, Nobutaka; Takeoka, Shinji; Sawada, Kazuaki.

In: MRS Communications, 01.01.2019.

Research output: Contribution to journalArticle

Takahashi, Kazuhiro ; Fujie, Toshinori ; Teramoto, Reina ; Takahashi, Isao ; Sato, Nobutaka ; Takeoka, Shinji ; Sawada, Kazuaki. / Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection. In: MRS Communications. 2019.
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