Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection

Kazuhiro Takahashi; Toshinori Fujie; Reina Teramoto; Isao Takahashi; Nobutaka Sato; Shinji Takeoka; Kazuaki Sawada

doi:10.1557/mrc.2019.11

Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection

Kazuhiro Takahashi, Toshinori Fujie, Reina Teramoto, Isao Takahashi, Nobutaka Sato, Shinji Takeoka, Kazuaki Sawada

Waseda Institute for Advanced Study

Research output: Contribution to journal › Article

Abstract

We developed a microelectromechanical-system optical interferometer based on an elastomer nanosheet using a polystyrene-polybutadiene-polystyrene (SBS) triblock copolymer for a suspended membrane as a way to improve the stress sensitivity for surface stress detection. The elastomeric SBS nanosheet provides a low Young's modulus of 28 ± 11 MPa, a large elastic strain of 24 ± 12%, and high adhesiveness, of which the surface charge and mechanical property are tunable by layer-by-layer (LbL) deposition of polysaccharides. A freestanding SBS nanosheet can be formed above a microcavity using a dry transfer technique without applying vacuum or high-temperature processes. The maximum deflection associated with molecular adsorption increased by sevenfold compared with a parylene-C-based optical interferometric transducer.

Original language	English
Journal	MRS Communications
DOIs	https://doi.org/10.1557/mrc.2019.11
Publication status	Published - 2019 Jan 1

ASJC Scopus subject areas

Materials Science(all)

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Takahashi, K., Fujie, T., Teramoto, R., Takahashi, I., Sato, N., Takeoka, S., & Sawada, K. (2019). Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection. MRS Communications. https://doi.org/10.1557/mrc.2019.11

@article{fd7bb7f915e34c26b5031d5c0b06764b,

title = "Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection",

abstract = "We developed a microelectromechanical-system optical interferometer based on an elastomer nanosheet using a polystyrene-polybutadiene-polystyrene (SBS) triblock copolymer for a suspended membrane as a way to improve the stress sensitivity for surface stress detection. The elastomeric SBS nanosheet provides a low Young's modulus of 28 ± 11 MPa, a large elastic strain of 24 ± 12%, and high adhesiveness, of which the surface charge and mechanical property are tunable by layer-by-layer (LbL) deposition of polysaccharides. A freestanding SBS nanosheet can be formed above a microcavity using a dry transfer technique without applying vacuum or high-temperature processes. The maximum deflection associated with molecular adsorption increased by sevenfold compared with a parylene-C-based optical interferometric transducer.",

author = "Kazuhiro Takahashi and Toshinori Fujie and Reina Teramoto and Isao Takahashi and Nobutaka Sato and Shinji Takeoka and Kazuaki Sawada",

year = "2019",

month = jan,

day = "1",

doi = "10.1557/mrc.2019.11",

language = "English",

journal = "MRS Communications",

issn = "2159-6859",

publisher = "Cambridge University Press",

}

TY - JOUR

T1 - Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection

AU - Takahashi, Kazuhiro

AU - Fujie, Toshinori

AU - Teramoto, Reina

AU - Takahashi, Isao

AU - Sato, Nobutaka

AU - Takeoka, Shinji

AU - Sawada, Kazuaki

PY - 2019/1/1

Y1 - 2019/1/1

N2 - We developed a microelectromechanical-system optical interferometer based on an elastomer nanosheet using a polystyrene-polybutadiene-polystyrene (SBS) triblock copolymer for a suspended membrane as a way to improve the stress sensitivity for surface stress detection. The elastomeric SBS nanosheet provides a low Young's modulus of 28 ± 11 MPa, a large elastic strain of 24 ± 12%, and high adhesiveness, of which the surface charge and mechanical property are tunable by layer-by-layer (LbL) deposition of polysaccharides. A freestanding SBS nanosheet can be formed above a microcavity using a dry transfer technique without applying vacuum or high-temperature processes. The maximum deflection associated with molecular adsorption increased by sevenfold compared with a parylene-C-based optical interferometric transducer.

AB - We developed a microelectromechanical-system optical interferometer based on an elastomer nanosheet using a polystyrene-polybutadiene-polystyrene (SBS) triblock copolymer for a suspended membrane as a way to improve the stress sensitivity for surface stress detection. The elastomeric SBS nanosheet provides a low Young's modulus of 28 ± 11 MPa, a large elastic strain of 24 ± 12%, and high adhesiveness, of which the surface charge and mechanical property are tunable by layer-by-layer (LbL) deposition of polysaccharides. A freestanding SBS nanosheet can be formed above a microcavity using a dry transfer technique without applying vacuum or high-temperature processes. The maximum deflection associated with molecular adsorption increased by sevenfold compared with a parylene-C-based optical interferometric transducer.

UR - http://www.scopus.com/inward/record.url?scp=85062232868&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85062232868&partnerID=8YFLogxK

U2 - 10.1557/mrc.2019.11

DO - 10.1557/mrc.2019.11

M3 - Article

AN - SCOPUS:85062232868

JO - MRS Communications

JF - MRS Communications

SN - 2159-6859

ER -