Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection

Kazuhiro Takahashi, Toshinori Fujie, Reina Teramoto, Isao Takahashi, Nobutaka Sato, Shinji Takeoka, Kazuaki Sawada

Research output: Contribution to journalArticle

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Chemical Compounds

Engineering & Materials Science