Electrical breakdown characteristics of plasma-copolymerized thin films from allylamine and ethylene

Toshiki Nakano, Osamu Nakamura, Naoki Shibayama, Yoshimichi Ohki

    Research output: Contribution to journalArticle

    1 Citation (Scopus)

    Abstract

    Plasma polymerization is a method to make uniform thin organic films with a small number of pinholes, and to make films from almost all organic compounds. The method can copolymerize different monomers. The synthesized films have good resistance to heat and chemicals. Plasma polymers are considered for application to passivation or insulation layers of integrated circuits and electronic devices. We have reported that the plasma polymer copolymerized from allylamine and ethylene can be used as an orientation layer for a liquid crystal. In realizing these applications, high-field characteristics, especially dielectric breakdown of plasma polymers, will become important. However, the breakdown phenomena of plasma polymers have been studied little. In this paper, the effect of polar groups by plasma copolymerization on the breakdown process is reported.

    Original languageEnglish
    Pages (from-to)8-19
    Number of pages12
    JournalElectrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi)
    Volume108
    Issue number4
    Publication statusPublished - 1988 Jul

    Fingerprint

    Ethylene
    Plasmas
    Thin films
    Polymers
    Plasma polymerization
    Electric breakdown
    Organic compounds
    Passivation
    Crystal orientation
    Liquid crystals
    Copolymerization
    Integrated circuits
    Insulation
    Monomers

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering

    Cite this

    Electrical breakdown characteristics of plasma-copolymerized thin films from allylamine and ethylene. / Nakano, Toshiki; Nakamura, Osamu; Shibayama, Naoki; Ohki, Yoshimichi.

    In: Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi), Vol. 108, No. 4, 07.1988, p. 8-19.

    Research output: Contribution to journalArticle

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