Electrically driven varifocal micro lens fabricated by depositing parylene directly on liquid

Binh Khiem Nguyen, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

24 Citations (Scopus)

Abstract

The design and fabrication process of an electrically-driven varifocal liquid microlens are reported with experimental measurement results and a theoretical calculation model. Droplets of oil are sandwitched between a glass wafer and a thin-film of parylene chemical vapor deposited (CVD) directly onto the droplets' liquid surface. A method for creating fluid-filled micro chambers was realized with two core steps: 1) placing-shaping of oil drop-lets with hydrophobic/hydrophilic patterns and 2) coating them with a thin CVD parylene film in high vacuum condition. Liquid lenses and lens arrays of diameter from 20μm to 10mm were fabricated. In the tuning experiment, focal length was shortened to 20% of its initial value, from 3.8mm to 0.8mm. The values calculated from model match the data collected from experiments within the range of applied voltage from 0V to 150V.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages305-308
Number of pages4
Publication statusPublished - 2007
Externally publishedYes
Event20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe
Duration: 2007 Jan 212007 Jan 25

Other

Other20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
CityKobe
Period07/1/2107/1/25

Fingerprint

Lenses
oils
lenses
vapors
liquid surfaces
Oils
Liquids
liquids
high vacuum
Vapors
chambers
tuning
wafers
coatings
fabrication
glass
fluids
electric potential
thin films
Tuning

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Nguyen, B. K., Iwase, E., Matsumoto, K., & Shimoyama, I. (2007). Electrically driven varifocal micro lens fabricated by depositing parylene directly on liquid. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 305-308). [4433059]

Electrically driven varifocal micro lens fabricated by depositing parylene directly on liquid. / Nguyen, Binh Khiem; Iwase, Eiji; Matsumoto, Kiyoshi; Shimoyama, Isao.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2007. p. 305-308 4433059.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nguyen, BK, Iwase, E, Matsumoto, K & Shimoyama, I 2007, Electrically driven varifocal micro lens fabricated by depositing parylene directly on liquid. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 4433059, pp. 305-308, 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, Kobe, 07/1/21.
Nguyen BK, Iwase E, Matsumoto K, Shimoyama I. Electrically driven varifocal micro lens fabricated by depositing parylene directly on liquid. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2007. p. 305-308. 4433059
Nguyen, Binh Khiem ; Iwase, Eiji ; Matsumoto, Kiyoshi ; Shimoyama, Isao. / Electrically driven varifocal micro lens fabricated by depositing parylene directly on liquid. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2007. pp. 305-308
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