Electrochemical formation process of Si macropore and metal filling for high aspect ratio metal microstructure using single electrolyte system

Hirotaka Sato, Takayuki Homma*, Kentaro Mori, Tetsuya Osaka, Shuichi Shoji

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds