Electrodeposition of ZnO from acetate bath for thermoelectric devices

H. Matsuo, K. Yoshitoku, D. Furuyama, Mikiko Saito, Takayuki Homma

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We attempted to form ZnO films with smooth surface for the application of thermoelectric micro-devices, using electrodeposition process. In order to reduce the defects of the films such as cracks and pits mainly caused by the gas evolution, the bath containing acetate in addition to nitrate ions was developed to reduce the gas evolution during the deposition. Using this bath, formation of ZnO. rather than Zn metallic films, was confirmed by Raman spectroscopy. The films had no cracks and the surface became smoother than those eiectrodeposited from the conventional nitrate-based bath. In order to fabricate the micro- devices, The ZnO was eiectrodeposited into the patterns with diameter of 200μm. As a result, ZnO successfully filled the pattern keeping the smooth surface conditions, which demonstrated the applicability of the ZnO films to micro-device fabrication.

Original languageEnglish
Title of host publicationGeneral Student Poster Session
PublisherElectrochemical Society Inc.
Pages143-148
Number of pages6
Volume75
Edition52
ISBN (Electronic)9781607685395
DOIs
Publication statusPublished - 2016 Jan 1
EventSymposium on General Student Poster Session - PRiME 2016/230th ECS Meeting - Honolulu, United States
Duration: 2016 Oct 22016 Oct 7

Other

OtherSymposium on General Student Poster Session - PRiME 2016/230th ECS Meeting
CountryUnited States
CityHonolulu
Period16/10/216/10/7

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Matsuo, H., Yoshitoku, K., Furuyama, D., Saito, M., & Homma, T. (2016). Electrodeposition of ZnO from acetate bath for thermoelectric devices. In General Student Poster Session (52 ed., Vol. 75, pp. 143-148). Electrochemical Society Inc.. https://doi.org/10.1149/07552.0143ecst