Electrodeposition of ZnO from acetate bath for thermoelectric devices

H. Matsuo; K. Yoshitoku; D. Furuyama; M. Saito; T. Homma

doi:10.1149/07552.0143ecst

Electrodeposition of ZnO from acetate bath for thermoelectric devices

H. Matsuo, K. Yoshitoku, D. Furuyama, M. Saito, T. Homma

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

We attempted to form ZnO films with smooth surface for the application of thermoelectric micro-devices, using electrodeposition process. In order to reduce the defects of the films such as cracks and pits mainly caused by the gas evolution, the bath containing acetate in addition to nitrate ions was developed to reduce the gas evolution during the deposition. Using this bath, formation of ZnO. rather than Zn metallic films, was confirmed by Raman spectroscopy. The films had no cracks and the surface became smoother than those eiectrodeposited from the conventional nitrate-based bath. In order to fabricate the micro- devices, The ZnO was eiectrodeposited into the patterns with diameter of 200μm. As a result, ZnO successfully filled the pattern keeping the smooth surface conditions, which demonstrated the applicability of the ZnO films to micro-device fabrication.

Original language	English
Title of host publication	General Student Poster Session
Editors	A. H. Suroviec, V. Subramanian, V. Chaitanya, K. Sundaram, P. Pharkaya, W. Sugimoto, W.-S. Yoon
Publisher	Electrochemical Society Inc.
Pages	143-148
Number of pages	6
Edition	52
ISBN (Electronic)	9781607688013
DOIs	https://doi.org/10.1149/07552.0143ecst
Publication status	Published - 2016
Event	Symposium on General Student Poster Session - PRiME 2016/230th ECS Meeting - Honolulu, United States Duration: 2016 Oct 2 → 2016 Oct 7

Publication series

Name	ECS Transactions
Number	52
Volume	75
ISSN (Print)	1938-6737
ISSN (Electronic)	1938-5862

Other

Other	Symposium on General Student Poster Session - PRiME 2016/230th ECS Meeting
Country/Territory	United States
City	Honolulu
Period	16/10/2 → 16/10/7

ASJC Scopus subject areas

Engineering(all)

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10.1149/07552.0143ecst

Cite this

Matsuo, H., Yoshitoku, K., Furuyama, D., Saito, M., & Homma, T. (2016). Electrodeposition of ZnO from acetate bath for thermoelectric devices. In A. H. Suroviec, V. Subramanian, V. Chaitanya, K. Sundaram, P. Pharkaya, W. Sugimoto, & W-S. Yoon (Eds.), General Student Poster Session (52 ed., pp. 143-148). (ECS Transactions; Vol. 75, No. 52). Electrochemical Society Inc.. https://doi.org/10.1149/07552.0143ecst

Electrodeposition of ZnO from acetate bath for thermoelectric devices. / Matsuo, H.; Yoshitoku, K.; Furuyama, D. et al.

General Student Poster Session. ed. / A. H. Suroviec; V. Subramanian; V. Chaitanya; K. Sundaram; P. Pharkaya; W. Sugimoto; W.-S. Yoon. 52. ed. Electrochemical Society Inc., 2016. p. 143-148 (ECS Transactions; Vol. 75, No. 52).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Matsuo, H, Yoshitoku, K, Furuyama, D, Saito, M & Homma, T 2016, Electrodeposition of ZnO from acetate bath for thermoelectric devices. in AH Suroviec, V Subramanian, V Chaitanya, K Sundaram, P Pharkaya, W Sugimoto & W-S Yoon (eds), General Student Poster Session. 52 edn, ECS Transactions, no. 52, vol. 75, Electrochemical Society Inc., pp. 143-148, Symposium on General Student Poster Session - PRiME 2016/230th ECS Meeting, Honolulu, United States, 16/10/2. https://doi.org/10.1149/07552.0143ecst

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abstract = "We attempted to form ZnO films with smooth surface for the application of thermoelectric micro-devices, using electrodeposition process. In order to reduce the defects of the films such as cracks and pits mainly caused by the gas evolution, the bath containing acetate in addition to nitrate ions was developed to reduce the gas evolution during the deposition. Using this bath, formation of ZnO. rather than Zn metallic films, was confirmed by Raman spectroscopy. The films had no cracks and the surface became smoother than those eiectrodeposited from the conventional nitrate-based bath. In order to fabricate the micro- devices, The ZnO was eiectrodeposited into the patterns with diameter of 200μm. As a result, ZnO successfully filled the pattern keeping the smooth surface conditions, which demonstrated the applicability of the ZnO films to micro-device fabrication.",

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AU - Yoshitoku, K.

AU - Furuyama, D.

AU - Saito, M.

AU - Homma, T.

PY - 2016

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N2 - We attempted to form ZnO films with smooth surface for the application of thermoelectric micro-devices, using electrodeposition process. In order to reduce the defects of the films such as cracks and pits mainly caused by the gas evolution, the bath containing acetate in addition to nitrate ions was developed to reduce the gas evolution during the deposition. Using this bath, formation of ZnO. rather than Zn metallic films, was confirmed by Raman spectroscopy. The films had no cracks and the surface became smoother than those eiectrodeposited from the conventional nitrate-based bath. In order to fabricate the micro- devices, The ZnO was eiectrodeposited into the patterns with diameter of 200μm. As a result, ZnO successfully filled the pattern keeping the smooth surface conditions, which demonstrated the applicability of the ZnO films to micro-device fabrication.

AB - We attempted to form ZnO films with smooth surface for the application of thermoelectric micro-devices, using electrodeposition process. In order to reduce the defects of the films such as cracks and pits mainly caused by the gas evolution, the bath containing acetate in addition to nitrate ions was developed to reduce the gas evolution during the deposition. Using this bath, formation of ZnO. rather than Zn metallic films, was confirmed by Raman spectroscopy. The films had no cracks and the surface became smoother than those eiectrodeposited from the conventional nitrate-based bath. In order to fabricate the micro- devices, The ZnO was eiectrodeposited into the patterns with diameter of 200μm. As a result, ZnO successfully filled the pattern keeping the smooth surface conditions, which demonstrated the applicability of the ZnO films to micro-device fabrication.

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Electrodeposition of ZnO from acetate bath for thermoelectric devices

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