Electrodeposition of ZnO from acetate bath for thermoelectric devices

H. Matsuo; K. Yoshitoku; D. Furuyama; Mikiko Saito; Takayuki Homma

doi:10.1149/07552.0143ecst

Electrodeposition of ZnO from acetate bath for thermoelectric devices

H. Matsuo, K. Yoshitoku, D. Furuyama, Mikiko Saito, Takayuki Homma

Research Organization for Nano & Life Innovation

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

We attempted to form ZnO films with smooth surface for the application of thermoelectric micro-devices, using electrodeposition process. In order to reduce the defects of the films such as cracks and pits mainly caused by the gas evolution, the bath containing acetate in addition to nitrate ions was developed to reduce the gas evolution during the deposition. Using this bath, formation of ZnO. rather than Zn metallic films, was confirmed by Raman spectroscopy. The films had no cracks and the surface became smoother than those eiectrodeposited from the conventional nitrate-based bath. In order to fabricate the micro- devices, The ZnO was eiectrodeposited into the patterns with diameter of 200μm. As a result, ZnO successfully filled the pattern keeping the smooth surface conditions, which demonstrated the applicability of the ZnO films to micro-device fabrication.

Original language	English
Title of host publication	General Student Poster Session
Publisher	Electrochemical Society Inc.
Pages	143-148
Number of pages	6
Volume	75
Edition	52
ISBN (Electronic)	9781607685395
DOIs	https://doi.org/10.1149/07552.0143ecst
Publication status	Published - 2016 Jan 1
Event	Symposium on General Student Poster Session - PRiME 2016/230th ECS Meeting - Honolulu, United States Duration: 2016 Oct 2 → 2016 Oct 7

Other

Other	Symposium on General Student Poster Session - PRiME 2016/230th ECS Meeting
Country	United States
City	Honolulu
Period	16/10/2 → 16/10/7

ASJC Scopus subject areas

Engineering(all)

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Matsuo, H, Yoshitoku, K, Furuyama, D, Saito, M & Homma, T 2016, Electrodeposition of ZnO from acetate bath for thermoelectric devices. in General Student Poster Session. 52 edn, vol. 75, Electrochemical Society Inc., pp. 143-148, Symposium on General Student Poster Session - PRiME 2016/230th ECS Meeting, Honolulu, United States, 16/10/2. https://doi.org/10.1149/07552.0143ecst

@inproceedings{5603bde6c66c45d687bfd5d6eeddb1f0,

title = "Electrodeposition of ZnO from acetate bath for thermoelectric devices",

abstract = "We attempted to form ZnO films with smooth surface for the application of thermoelectric micro-devices, using electrodeposition process. In order to reduce the defects of the films such as cracks and pits mainly caused by the gas evolution, the bath containing acetate in addition to nitrate ions was developed to reduce the gas evolution during the deposition. Using this bath, formation of ZnO. rather than Zn metallic films, was confirmed by Raman spectroscopy. The films had no cracks and the surface became smoother than those eiectrodeposited from the conventional nitrate-based bath. In order to fabricate the micro- devices, The ZnO was eiectrodeposited into the patterns with diameter of 200μm. As a result, ZnO successfully filled the pattern keeping the smooth surface conditions, which demonstrated the applicability of the ZnO films to micro-device fabrication.",

author = "H. Matsuo and K. Yoshitoku and D. Furuyama and Mikiko Saito and Takayuki Homma",

year = "2016",

month = jan,

day = "1",

doi = "10.1149/07552.0143ecst",

language = "English",

volume = "75",

pages = "143--148",

booktitle = "General Student Poster Session",

publisher = "Electrochemical Society Inc.",

edition = "52",

note = "Symposium on General Student Poster Session - PRiME 2016/230th ECS Meeting ; Conference date: 02-10-2016 Through 07-10-2016",

}

TY - GEN

T1 - Electrodeposition of ZnO from acetate bath for thermoelectric devices

AU - Matsuo, H.

AU - Yoshitoku, K.

AU - Furuyama, D.

AU - Saito, Mikiko

AU - Homma, Takayuki

PY - 2016/1/1

Y1 - 2016/1/1

N2 - We attempted to form ZnO films with smooth surface for the application of thermoelectric micro-devices, using electrodeposition process. In order to reduce the defects of the films such as cracks and pits mainly caused by the gas evolution, the bath containing acetate in addition to nitrate ions was developed to reduce the gas evolution during the deposition. Using this bath, formation of ZnO. rather than Zn metallic films, was confirmed by Raman spectroscopy. The films had no cracks and the surface became smoother than those eiectrodeposited from the conventional nitrate-based bath. In order to fabricate the micro- devices, The ZnO was eiectrodeposited into the patterns with diameter of 200μm. As a result, ZnO successfully filled the pattern keeping the smooth surface conditions, which demonstrated the applicability of the ZnO films to micro-device fabrication.

AB - We attempted to form ZnO films with smooth surface for the application of thermoelectric micro-devices, using electrodeposition process. In order to reduce the defects of the films such as cracks and pits mainly caused by the gas evolution, the bath containing acetate in addition to nitrate ions was developed to reduce the gas evolution during the deposition. Using this bath, formation of ZnO. rather than Zn metallic films, was confirmed by Raman spectroscopy. The films had no cracks and the surface became smoother than those eiectrodeposited from the conventional nitrate-based bath. In order to fabricate the micro- devices, The ZnO was eiectrodeposited into the patterns with diameter of 200μm. As a result, ZnO successfully filled the pattern keeping the smooth surface conditions, which demonstrated the applicability of the ZnO films to micro-device fabrication.

UR - http://www.scopus.com/inward/record.url?scp=85025147923&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85025147923&partnerID=8YFLogxK

U2 - 10.1149/07552.0143ecst

DO - 10.1149/07552.0143ecst

M3 - Conference contribution

AN - SCOPUS:85025147923

VL - 75

SP - 143

EP - 148

BT - General Student Poster Session

PB - Electrochemical Society Inc.

T2 - Symposium on General Student Poster Session - PRiME 2016/230th ECS Meeting

Y2 - 2 October 2016 through 7 October 2016

ER -

Electrodeposition of ZnO from acetate bath for thermoelectric devices

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