Electroless diffusion barrier process using SAM on low-k dielectrics

M. Yoshino, T. Masuda, T. Yokoshima, J. Sasano, Y. Shacham-Diamand, I. Matsuda, T. Osaka, Y. Hagiwara, I. Sato

Research output: Contribution to journalArticlepeer-review

29 Citations (Scopus)

Fingerprint Dive into the research topics of 'Electroless diffusion barrier process using SAM on low-k dielectrics'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy