Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane

Takahiko Yanagitani; Natsuki Mishima; Mami Matsukawa; Yoshiaki Watanabe

doi:10.1109/TUFFC.2007.303

Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane

Takahiko Yanagitani, Natsuki Mishima, Mami Matsukawa, Yoshiaki Watanabe

Research output: Contribution to journal › Article › peer-review

26 Citations (Scopus)

Abstract

The (112macr0) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k15 are obtained by sputter deposition. An overmoded resonator, a layered structure of metal electrode film/(112macr0) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k15 by a resonant spectrum method. The (112macr0) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k15 of 0.24. This value was 92% of k15 value in single-crystal (k15 = 0.26)

Original language	English
Article number	4154630
Pages (from-to)	701-704
Number of pages	4
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	54
Issue number	4
DOIs	https://doi.org/10.1109/TUFFC.2007.303
Publication status	Published - 2007
Externally published	Yes

ASJC Scopus subject areas

Instrumentation
Acoustics and Ultrasonics
Electrical and Electronic Engineering

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10.1109/TUFFC.2007.303

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Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane. / Yanagitani, Takahiko; Mishima, Natsuki; Matsukawa, Mami; Watanabe, Yoshiaki.

In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 54, No. 4, 4154630, 2007, p. 701-704.

Research output: Contribution to journal › Article › peer-review

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abstract = "The (112macr0) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k15 are obtained by sputter deposition. An overmoded resonator, a layered structure of metal electrode film/(112macr0) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k15 by a resonant spectrum method. The (112macr0) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k15 of 0.24. This value was 92% of k15 value in single-crystal (k15 = 0.26)",

author = "Takahiko Yanagitani and Natsuki Mishima and Mami Matsukawa and Yoshiaki Watanabe",

note = "Funding Information: Manuscript received October 5, 2005; accepted November 2, 2006. This work was partly supported by the Grants-in-Aid for Scientific Research (B) from the Japan Society for the Promotion of Science and the Aid of Grant of Doshisha University{\textquoteright}s Research Promotion Fund.",

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AU - Yanagitani, Takahiko

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AU - Matsukawa, Mami

AU - Watanabe, Yoshiaki

N1 - Funding Information: Manuscript received October 5, 2005; accepted November 2, 2006. This work was partly supported by the Grants-in-Aid for Scientific Research (B) from the Japan Society for the Promotion of Science and the Aid of Grant of Doshisha University’s Research Promotion Fund.

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AB - The (112macr0) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k15 are obtained by sputter deposition. An overmoded resonator, a layered structure of metal electrode film/(112macr0) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k15 by a resonant spectrum method. The (112macr0) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k15 of 0.24. This value was 92% of k15 value in single-crystal (k15 = 0.26)

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Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane

Abstract

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