TY - JOUR
T1 - Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane
AU - Yanagitani, Takahiko
AU - Mishima, Natsuki
AU - Matsukawa, Mami
AU - Watanabe, Yoshiaki
N1 - Funding Information:
Manuscript received October 5, 2005; accepted November 2, 2006. This work was partly supported by the Grants-in-Aid for Scientific Research (B) from the Japan Society for the Promotion of Science and the Aid of Grant of Doshisha University’s Research Promotion Fund.
PY - 2007
Y1 - 2007
N2 - The (112macr0) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k15 are obtained by sputter deposition. An overmoded resonator, a layered structure of metal electrode film/(112macr0) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k15 by a resonant spectrum method. The (112macr0) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k15 of 0.24. This value was 92% of k15 value in single-crystal (k15 = 0.26)
AB - The (112macr0) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k15 are obtained by sputter deposition. An overmoded resonator, a layered structure of metal electrode film/(112macr0) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k15 by a resonant spectrum method. The (112macr0) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k15 of 0.24. This value was 92% of k15 value in single-crystal (k15 = 0.26)
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U2 - 10.1109/TUFFC.2007.303
DO - 10.1109/TUFFC.2007.303
M3 - Article
C2 - 17441579
AN - SCOPUS:34248586220
VL - 54
SP - 701
EP - 704
JO - Transactions of the IRE Professional Group on Ultrasonic Engineering
JF - Transactions of the IRE Professional Group on Ultrasonic Engineering
SN - 0885-3010
IS - 4
M1 - 4154630
ER -