Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane

Takahiko Yanagitani, Natsuki Mishima, Mami Matsukawa, Yoshiaki Watanabe

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

The (112macr0) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k15 are obtained by sputter deposition. An overmoded resonator, a layered structure of metal electrode film/(112macr0) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k15 by a resonant spectrum method. The (112macr0) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k15 of 0.24. This value was 92% of k15 value in single-crystal (k15 = 0.26)

Original languageEnglish
Article number4154630
Pages (from-to)701-704
Number of pages4
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume54
Issue number4
DOIs
Publication statusPublished - 2007
Externally publishedYes

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Electromechanical coupling
coupling coefficients
Substrates
electrodes
silica glass
metal films
Sputter deposition
Electrodes
Fused silica
Metals
resonators
alignment
Resonators
shear
Single crystals
single crystals
metals

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Acoustics and Ultrasonics
  • Instrumentation

Cite this

Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane. / Yanagitani, Takahiko; Mishima, Natsuki; Matsukawa, Mami; Watanabe, Yoshiaki.

In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 54, No. 4, 4154630, 2007, p. 701-704.

Research output: Contribution to journalArticle

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