Abstract
The (112macr0) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k15 are obtained by sputter deposition. An overmoded resonator, a layered structure of metal electrode film/(112macr0) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k15 by a resonant spectrum method. The (112macr0) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k15 of 0.24. This value was 92% of k15 value in single-crystal (k15 = 0.26)
| Original language | English |
|---|---|
| Article number | 4154630 |
| Pages (from-to) | 701-704 |
| Number of pages | 4 |
| Journal | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
| Volume | 54 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 2007 |
| Externally published | Yes |
Fingerprint
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Acoustics and Ultrasonics
- Instrumentation
Cite this
Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane. / Yanagitani, Takahiko; Mishima, Natsuki; Matsukawa, Mami; Watanabe, Yoshiaki.
In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 54, No. 4, 4154630, 2007, p. 701-704.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane
AU - Yanagitani, Takahiko
AU - Mishima, Natsuki
AU - Matsukawa, Mami
AU - Watanabe, Yoshiaki
PY - 2007
Y1 - 2007
N2 - The (112macr0) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k15 are obtained by sputter deposition. An overmoded resonator, a layered structure of metal electrode film/(112macr0) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k15 by a resonant spectrum method. The (112macr0) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k15 of 0.24. This value was 92% of k15 value in single-crystal (k15 = 0.26)
AB - The (112macr0) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k15 are obtained by sputter deposition. An overmoded resonator, a layered structure of metal electrode film/(112macr0) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k15 by a resonant spectrum method. The (112macr0) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k15 of 0.24. This value was 92% of k15 value in single-crystal (k15 = 0.26)
UR - http://www.scopus.com/inward/record.url?scp=34248586220&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34248586220&partnerID=8YFLogxK
U2 - 10.1109/TUFFC.2007.303
DO - 10.1109/TUFFC.2007.303
M3 - Article
C2 - 17441579
AN - SCOPUS:34248586220
VL - 54
SP - 701
EP - 704
JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
SN - 0885-3010
IS - 4
M1 - 4154630
ER -