Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane

Takahiko Yanagitani; Natsuki Mishima; Mami Matsukawa; Yoshiaki Watanabe

doi:10.1109/TUFFC.2007.303

Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane

Takahiko Yanagitani^*, Natsuki Mishima, Mami Matsukawa, Yoshiaki Watanabe

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

31 Citations (Scopus)

Abstract

The (112macr0) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k15 are obtained by sputter deposition. An overmoded resonator, a layered structure of metal electrode film/(112macr0) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k15 by a resonant spectrum method. The (112macr0) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k15 of 0.24. This value was 92% of k15 value in single-crystal (k15 = 0.26)

Original language	English
Article number	4154630
Pages (from-to)	701-704
Number of pages	4
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	54
Issue number	4
DOIs	https://doi.org/10.1109/TUFFC.2007.303
Publication status	Published - 2007
Externally published	Yes

ASJC Scopus subject areas

Instrumentation
Acoustics and Ultrasonics
Electrical and Electronic Engineering

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10.1109/TUFFC.2007.303

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@article{84f79070128c469fa5628f62df9b952f,

title = "Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane",

abstract = "The (112macr0) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k15 are obtained by sputter deposition. An overmoded resonator, a layered structure of metal electrode film/(112macr0) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k15 by a resonant spectrum method. The (112macr0) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k15 of 0.24. This value was 92% of k15 value in single-crystal (k15 = 0.26)",

author = "Takahiko Yanagitani and Natsuki Mishima and Mami Matsukawa and Yoshiaki Watanabe",

note = "Funding Information: Manuscript received October 5, 2005; accepted November 2, 2006. This work was partly supported by the Grants-in-Aid for Scientific Research (B) from the Japan Society for the Promotion of Science and the Aid of Grant of Doshisha University{\textquoteright}s Research Promotion Fund.",

year = "2007",

doi = "10.1109/TUFFC.2007.303",

language = "English",

volume = "54",

pages = "701--704",

journal = "Transactions of the IRE Professional Group on Ultrasonic Engineering",

issn = "0885-3010",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "4",

}

TY - JOUR

T1 - Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane

AU - Yanagitani, Takahiko

AU - Mishima, Natsuki

AU - Matsukawa, Mami

AU - Watanabe, Yoshiaki

N1 - Funding Information: Manuscript received October 5, 2005; accepted November 2, 2006. This work was partly supported by the Grants-in-Aid for Scientific Research (B) from the Japan Society for the Promotion of Science and the Aid of Grant of Doshisha University’s Research Promotion Fund.

PY - 2007

Y1 - 2007

N2 - The (112macr0) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k15 are obtained by sputter deposition. An overmoded resonator, a layered structure of metal electrode film/(112macr0) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k15 by a resonant spectrum method. The (112macr0) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k15 of 0.24. This value was 92% of k15 value in single-crystal (k15 = 0.26)

AB - The (112macr0) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k15 are obtained by sputter deposition. An overmoded resonator, a layered structure of metal electrode film/(112macr0) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k15 by a resonant spectrum method. The (112macr0) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k15 of 0.24. This value was 92% of k15 value in single-crystal (k15 = 0.26)

UR - http://www.scopus.com/inward/record.url?scp=34248586220&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34248586220&partnerID=8YFLogxK

U2 - 10.1109/TUFFC.2007.303

DO - 10.1109/TUFFC.2007.303

M3 - Article

C2 - 17441579

AN - SCOPUS:34248586220

VL - 54

SP - 701

EP - 704

JO - Transactions of the IRE Professional Group on Ultrasonic Engineering

JF - Transactions of the IRE Professional Group on Ultrasonic Engineering

SN - 0885-3010

IS - 4

M1 - 4154630

ER -

Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane

Abstract

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