Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane

Takahiko Yanagitani, Natsuki Mishima, Mami Matsukawa, Yoshiaki Watanabe

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26 Citations (Scopus)

Abstract

The (112macr0) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k15 are obtained by sputter deposition. An overmoded resonator, a layered structure of metal electrode film/(112macr0) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k15 by a resonant spectrum method. The (112macr0) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k15 of 0.24. This value was 92% of k15 value in single-crystal (k15 = 0.26)

Original languageEnglish
Article number4154630
Pages (from-to)701-704
Number of pages4
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume54
Issue number4
DOIs
Publication statusPublished - 2007
Externally publishedYes

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Acoustics and Ultrasonics
  • Instrumentation

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