Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane

Takahiko Yanagitani; Natsuki Mishima; Mami Matsukawa; Yoshiaki Watanabe

doi:10.1109/TUFFC.2007.303

Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane

Takahiko Yanagitani, Natsuki Mishima, Mami Matsukawa, Yoshiaki Watanabe

Research output: Contribution to journal › Article

26 Citations (Scopus)

Abstract

The (112macr0) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k15 are obtained by sputter deposition. An overmoded resonator, a layered structure of metal electrode film/(112macr0) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k15 by a resonant spectrum method. The (112macr0) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k15 of 0.24. This value was 92% of k15 value in single-crystal (k15 = 0.26)

Original language	English
Article number	4154630
Pages (from-to)	701-704
Number of pages	4
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	54
Issue number	4
DOIs	https://doi.org/10.1109/TUFFC.2007.303
Publication status	Published - 2007
Externally published	Yes

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ASJC Scopus subject areas

Electrical and Electronic Engineering
Acoustics and Ultrasonics
Instrumentation

Cite this

Yanagitani, T., Mishima, N., Matsukawa, M., & Watanabe, Y. (2007). Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 54(4), 701-704. [4154630]. https://doi.org/10.1109/TUFFC.2007.303

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10.1109/TUFFC.2007.303