Abstract
The (112macr0) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k15 are obtained by sputter deposition. An overmoded resonator, a layered structure of metal electrode film/(112macr0) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k15 by a resonant spectrum method. The (112macr0) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k15 of 0.24. This value was 92% of k15 value in single-crystal (k15 = 0.26)
| Original language | English |
|---|---|
| Article number | 4154630 |
| Pages (from-to) | 701-704 |
| Number of pages | 4 |
| Journal | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
| Volume | 54 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 2007 Dec 1 |
| Externally published | Yes |
ASJC Scopus subject areas
- Instrumentation
- Acoustics and Ultrasonics
- Electrical and Electronic Engineering
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Cite this
Yanagitani, T., Mishima, N., Matsukawa, M., & Watanabe, Y. (2007). Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 54(4), 701-704. [4154630]. https://doi.org/10.1109/TUFFC.2007.303