Electromechanical coupling coefficient k15 and crystallites alignment of (112̄0) textured Zno films

Takahiko Yanagitani, Masato Kiuchi, Mami Matsukawa, Yoshiaki Watanabe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

Pure-shear mode piezoelectric device applications require that the ZnO film where crystallites c-axis lie in the substrate plane and be unidirectionallly aligned ((112̄0) textured ZnO films). This paper reports the relationship between degrees of crystallites alignment and shear mode electromechanical coupling coefficient k15 of the (112̄0) textured ZnO films.

Original languageEnglish
Title of host publication2006 IEEE International Ultrasonics Symposium, IUS
Pages1463-1466
Number of pages4
DOIs
Publication statusPublished - 2006 Dec 1

Publication series

NameProceedings - IEEE Ultrasonics Symposium
Volume1
ISSN (Print)1051-0117

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Keywords

  • (11-20) textured ZnO film
  • Pure-shear mode film bulk acoustic resonator
  • RF magnetron sputtering
  • Shear mode electromechanical coupling coefficient k

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Cite this

Yanagitani, T., Kiuchi, M., Matsukawa, M., & Watanabe, Y. (2006). Electromechanical coupling coefficient k15 and crystallites alignment of (112̄0) textured Zno films. In 2006 IEEE International Ultrasonics Symposium, IUS (pp. 1463-1466). [4152224] (Proceedings - IEEE Ultrasonics Symposium; Vol. 1). https://doi.org/10.1109/ULTSYM.2006.368