Electromechanical coupling coefficient k15 and crystallites alignment of (112̄0) textured Zno films

Takahiko Yanagitani, Masato Kiuchi, Mami Matsukawa, Yoshiaki Watanabe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

Pure-shear mode piezoelectric device applications require that the ZnO film where crystallites c-axis lie in the substrate plane and be unidirectionallly aligned ((112̄0) textured ZnO films). This paper reports the relationship between degrees of crystallites alignment and shear mode electromechanical coupling coefficient k15 of the (112̄0) textured ZnO films.

Original languageEnglish
Title of host publicationProceedings - IEEE Ultrasonics Symposium
Pages1463-1466
Number of pages4
Volume1
DOIs
Publication statusPublished - 2006
Externally publishedYes

Fingerprint

coupling coefficients
crystallites
alignment
shear

Keywords

  • (11-20) textured ZnO film
  • Pure-shear mode film bulk acoustic resonator
  • RF magnetron sputtering
  • Shear mode electromechanical coupling coefficient k

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Cite this

Yanagitani, T., Kiuchi, M., Matsukawa, M., & Watanabe, Y. (2006). Electromechanical coupling coefficient k15 and crystallites alignment of (112̄0) textured Zno films. In Proceedings - IEEE Ultrasonics Symposium (Vol. 1, pp. 1463-1466). [4152224] https://doi.org/10.1109/ULTSYM.2006.368

Electromechanical coupling coefficient k15 and crystallites alignment of (112̄0) textured Zno films. / Yanagitani, Takahiko; Kiuchi, Masato; Matsukawa, Mami; Watanabe, Yoshiaki.

Proceedings - IEEE Ultrasonics Symposium. Vol. 1 2006. p. 1463-1466 4152224.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yanagitani, T, Kiuchi, M, Matsukawa, M & Watanabe, Y 2006, Electromechanical coupling coefficient k15 and crystallites alignment of (112̄0) textured Zno films. in Proceedings - IEEE Ultrasonics Symposium. vol. 1, 4152224, pp. 1463-1466. https://doi.org/10.1109/ULTSYM.2006.368
Yanagitani T, Kiuchi M, Matsukawa M, Watanabe Y. Electromechanical coupling coefficient k15 and crystallites alignment of (112̄0) textured Zno films. In Proceedings - IEEE Ultrasonics Symposium. Vol. 1. 2006. p. 1463-1466. 4152224 https://doi.org/10.1109/ULTSYM.2006.368
Yanagitani, Takahiko ; Kiuchi, Masato ; Matsukawa, Mami ; Watanabe, Yoshiaki. / Electromechanical coupling coefficient k15 and crystallites alignment of (112̄0) textured Zno films. Proceedings - IEEE Ultrasonics Symposium. Vol. 1 2006. pp. 1463-1466
@inproceedings{581630fac5b54e59bbbbc7bef851065d,
title = "Electromechanical coupling coefficient k15 and crystallites alignment of (112̄0) textured Zno films",
abstract = "Pure-shear mode piezoelectric device applications require that the ZnO film where crystallites c-axis lie in the substrate plane and be unidirectionallly aligned ((112̄0) textured ZnO films). This paper reports the relationship between degrees of crystallites alignment and shear mode electromechanical coupling coefficient k15 of the (112̄0) textured ZnO films.",
keywords = "(11-20) textured ZnO film, Pure-shear mode film bulk acoustic resonator, RF magnetron sputtering, Shear mode electromechanical coupling coefficient k",
author = "Takahiko Yanagitani and Masato Kiuchi and Mami Matsukawa and Yoshiaki Watanabe",
year = "2006",
doi = "10.1109/ULTSYM.2006.368",
language = "English",
isbn = "1424402018",
volume = "1",
pages = "1463--1466",
booktitle = "Proceedings - IEEE Ultrasonics Symposium",

}

TY - GEN

T1 - Electromechanical coupling coefficient k15 and crystallites alignment of (112̄0) textured Zno films

AU - Yanagitani, Takahiko

AU - Kiuchi, Masato

AU - Matsukawa, Mami

AU - Watanabe, Yoshiaki

PY - 2006

Y1 - 2006

N2 - Pure-shear mode piezoelectric device applications require that the ZnO film where crystallites c-axis lie in the substrate plane and be unidirectionallly aligned ((112̄0) textured ZnO films). This paper reports the relationship between degrees of crystallites alignment and shear mode electromechanical coupling coefficient k15 of the (112̄0) textured ZnO films.

AB - Pure-shear mode piezoelectric device applications require that the ZnO film where crystallites c-axis lie in the substrate plane and be unidirectionallly aligned ((112̄0) textured ZnO films). This paper reports the relationship between degrees of crystallites alignment and shear mode electromechanical coupling coefficient k15 of the (112̄0) textured ZnO films.

KW - (11-20) textured ZnO film

KW - Pure-shear mode film bulk acoustic resonator

KW - RF magnetron sputtering

KW - Shear mode electromechanical coupling coefficient k

UR - http://www.scopus.com/inward/record.url?scp=78649358930&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=78649358930&partnerID=8YFLogxK

U2 - 10.1109/ULTSYM.2006.368

DO - 10.1109/ULTSYM.2006.368

M3 - Conference contribution

SN - 1424402018

SN - 9781424402014

VL - 1

SP - 1463

EP - 1466

BT - Proceedings - IEEE Ultrasonics Symposium

ER -