Electromechanical coupling coefficient k15 of (112̄0) textured ZnO films

Takahiko Yanagitani, Natsuki Mishima, Mami Matsukawa, Yoshiaki Watanabe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The ZnO film, whose crystallites c-axis align parallel to the substrate plane [(112̄0) textured ZnO films], has many potential advantages as shear-mode piezoelectric devices. In this study, shear mode electromechanical coupling coefficient k15 of (112̄0) textured polycrystalline ZnO films was estimated. An over-moded resonator consists of metal electrode film / (112̄0) textured ZnO piezoelectric film / metal electrode film / silica glass substrate was used to characterize k15 by a resonant spectrum method. For example, the (1120) textured ZnO piezoelectric films with good crystallite alignment show an electromechanical coupling coefficient k 15 of 0.24 which is 92% of the value of single-crystalline (k 15 = 0.26).

Original languageEnglish
Title of host publication2005 IEEE Ultrasonics Symposium
Pages1824-1827
Number of pages4
DOIs
Publication statusPublished - 2005 Dec 1
Externally publishedYes
Event2005 IEEE Ultrasonics Symposium - Rotterdam, Netherlands
Duration: 2005 Sep 182005 Sep 21

Publication series

NameProceedings - IEEE Ultrasonics Symposium
Volume3
ISSN (Print)1051-0117

Other

Other2005 IEEE Ultrasonics Symposium
CountryNetherlands
CityRotterdam
Period05/9/1805/9/21

Keywords

  • (11-20) textured ZnO piezoelectric films
  • Electromechnical coupling coefficient
  • Shear mode FBAR

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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