Electromechanical coupling coefficient k15 of (112̄0) textured ZnO films

Takahiko Yanagitani, Natsuki Mishima, Mami Matsukawa, Yoshiaki Watanabe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The ZnO film, whose crystallites c-axis align parallel to the substrate plane [(112̄0) textured ZnO films], has many potential advantages as shear-mode piezoelectric devices. In this study, shear mode electromechanical coupling coefficient k15 of (112̄0) textured polycrystalline ZnO films was estimated. An over-moded resonator consists of metal electrode film / (112̄0) textured ZnO piezoelectric film / metal electrode film / silica glass substrate was used to characterize k15 by a resonant spectrum method. For example, the (1120) textured ZnO piezoelectric films with good crystallite alignment show an electromechanical coupling coefficient k 15 of 0.24 which is 92% of the value of single-crystalline (k 15 = 0.26).

Original languageEnglish
Title of host publicationProceedings - IEEE Ultrasonics Symposium
Pages1824-1827
Number of pages4
Volume3
DOIs
Publication statusPublished - 2005
Externally publishedYes
Event2005 IEEE Ultrasonics Symposium - Rotterdam, Netherlands
Duration: 2005 Sep 182005 Sep 21

Other

Other2005 IEEE Ultrasonics Symposium
CountryNetherlands
CityRotterdam
Period05/9/1805/9/21

Fingerprint

Electromechanical coupling
Piezoelectric devices
Electrodes
Substrates
Fused silica
Metals
Crystallites
Resonators
Crystalline materials

Keywords

  • (11-20) textured ZnO piezoelectric films
  • Electromechnical coupling coefficient
  • Shear mode FBAR

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Yanagitani, T., Mishima, N., Matsukawa, M., & Watanabe, Y. (2005). Electromechanical coupling coefficient k15 of (112̄0) textured ZnO films. In Proceedings - IEEE Ultrasonics Symposium (Vol. 3, pp. 1824-1827). [1603223] https://doi.org/10.1109/ULTSYM.2005.1603223

Electromechanical coupling coefficient k15 of (112̄0) textured ZnO films. / Yanagitani, Takahiko; Mishima, Natsuki; Matsukawa, Mami; Watanabe, Yoshiaki.

Proceedings - IEEE Ultrasonics Symposium. Vol. 3 2005. p. 1824-1827 1603223.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yanagitani, T, Mishima, N, Matsukawa, M & Watanabe, Y 2005, Electromechanical coupling coefficient k15 of (112̄0) textured ZnO films. in Proceedings - IEEE Ultrasonics Symposium. vol. 3, 1603223, pp. 1824-1827, 2005 IEEE Ultrasonics Symposium, Rotterdam, Netherlands, 05/9/18. https://doi.org/10.1109/ULTSYM.2005.1603223
Yanagitani T, Mishima N, Matsukawa M, Watanabe Y. Electromechanical coupling coefficient k15 of (112̄0) textured ZnO films. In Proceedings - IEEE Ultrasonics Symposium. Vol. 3. 2005. p. 1824-1827. 1603223 https://doi.org/10.1109/ULTSYM.2005.1603223
Yanagitani, Takahiko ; Mishima, Natsuki ; Matsukawa, Mami ; Watanabe, Yoshiaki. / Electromechanical coupling coefficient k15 of (112̄0) textured ZnO films. Proceedings - IEEE Ultrasonics Symposium. Vol. 3 2005. pp. 1824-1827
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