Electron-beam-induced decomposition mechanisms of high-sensitivity chlorinated resist ZEP520A

Tomoko Gowa Oyama, Kazuyuki Enomoto, Yuji Hosaka, Akihiro Oshima, Masakazu Washio, Seiichi Tagawa

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    Abstract

    ZEP520A (1 : 1 copolymer of α-chloromethacrylate and α-methylstyrene, ZEON) is a main-chain scission-type positive-tone resist used for electron beam (EB) lithography and is known for its high sensitivity and high resolution. In this study, ZEP520A was irradiated using a 100 kV EB, and the decomposition mechanisms were analyzed by gel permeation chromatography, Fourier transform IR spectroscopy, NMR spectroscopy, and pulse radiolysis. Chlorines were confirmed to easily dissociate as Cl - ions (dissociative electron attachment, DEA) and ZEP520A underwent β-scission. Multiple channels could be considered for the main-chain scission, including DEA and the charge transfer complex between phenyl radical cations and Cl - ions.

    Original languageEnglish
    Article number036501
    JournalApplied Physics Express
    Volume5
    Issue number3
    DOIs
    Publication statusPublished - 2012 Mar

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    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy(all)

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