Electroplating technology of platinum catalyst for mems hydrogen gas sensor

Hiroshi Oigawa, Satoshi Ikezawa, Toshitsugu Ueda

    Research output: Contribution to journalArticle

    Abstract

    In this paper, we discuss electroplating method to deposit platinum catalyst called platinum black on the both-side of sensor on a quartz wafer to improve sensitivity of hydrogen sensors using quartz resonators. By increasing current density until th limiting current density, the platinum black films were deposited on the electrodes of sensors in a stable. Under the constan current condition, controllability of film thickness of platinum black by time was confirmed. As a result of comparison to th sputtered platinum thin film catalyst, the platinum black catalyst showed higher catalytic activity.

    Original languageEnglish
    Pages (from-to)511-514
    Number of pages4
    JournalIEEJ Transactions on Sensors and Micromachines
    Volume136
    Issue number12
    DOIs
    Publication statusPublished - 2016

    Fingerprint

    Electroplating
    Chemical sensors
    Platinum
    Hydrogen
    Catalysts
    Quartz
    Sensors
    Current density
    Controllability
    Film thickness
    Resonators
    Catalyst activity
    Deposits
    Thin films
    Electrodes

    Keywords

    • Electroplating
    • Hydrogen gas sensor
    • Platinum black
    • Platinum catalyst
    • Quartz resonator

    ASJC Scopus subject areas

    • Mechanical Engineering
    • Electrical and Electronic Engineering

    Cite this

    Electroplating technology of platinum catalyst for mems hydrogen gas sensor. / Oigawa, Hiroshi; Ikezawa, Satoshi; Ueda, Toshitsugu.

    In: IEEJ Transactions on Sensors and Micromachines, Vol. 136, No. 12, 2016, p. 511-514.

    Research output: Contribution to journalArticle

    Oigawa, Hiroshi ; Ikezawa, Satoshi ; Ueda, Toshitsugu. / Electroplating technology of platinum catalyst for mems hydrogen gas sensor. In: IEEJ Transactions on Sensors and Micromachines. 2016 ; Vol. 136, No. 12. pp. 511-514.
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