Electroplating technology of platinum catalyst for mems hydrogen gas sensor

Hiroshi Oigawa, Satoshi Ikezawa, Toshitsugu Ueda

    Research output: Contribution to journalArticle

    Abstract

    In this paper, we discuss electroplating method to deposit platinum catalyst called platinum black on the both-side of sensor on a quartz wafer to improve sensitivity of hydrogen sensors using quartz resonators. By increasing current density until th limiting current density, the platinum black films were deposited on the electrodes of sensors in a stable. Under the constan current condition, controllability of film thickness of platinum black by time was confirmed. As a result of comparison to th sputtered platinum thin film catalyst, the platinum black catalyst showed higher catalytic activity.

    Original languageEnglish
    Pages (from-to)511-514
    Number of pages4
    JournalIEEJ Transactions on Sensors and Micromachines
    Volume136
    Issue number12
    DOIs
    Publication statusPublished - 2016

    Keywords

    • Electroplating
    • Hydrogen gas sensor
    • Platinum black
    • Platinum catalyst
    • Quartz resonator

    ASJC Scopus subject areas

    • Mechanical Engineering
    • Electrical and Electronic Engineering

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