Ellipsoidal micro lens fabricated by depositing parylene directly on liquid

Ryoh Miyamoto, N. Binh-Khiem, E. Iwase, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

We report on an ellipsoidal liquid lens fabricated by PoLD (Parylene on liquid deposition). We fabricated ellipsoidal liquid lenses of 0.50, 1.00, 1.50, and 2.00 μl in volume on hydrophilic elliptical domains with 5.00mm major diameter and 2.50mm minor diameter. We measured the two focal lengths corresponding to major and minor diameters by observing the image formed by a laser beam. We verified that measured focal lengths agreed with theoretical calculated results. In addition, we showed that our method enables us to fabricate ellipsoidal lenses which have the focal lengths as designed.

Original languageEnglish
Title of host publicationTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages1365-1368
Number of pages4
DOIs
Publication statusPublished - 2009 Dec 14
EventTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
Duration: 2009 Jun 212009 Jun 25

Publication series

NameTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

ConferenceTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
CountryUnited States
CityDenver, CO
Period09/6/2109/6/25

Keywords

  • Chemical vapor deposition
  • Ellipsoidal lens
  • Liquid lens
  • Parylene

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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  • Cite this

    Miyamoto, R., Binh-Khiem, N., Iwase, E., Matsumoto, K., & Shimoyama, I. (2009). Ellipsoidal micro lens fabricated by depositing parylene directly on liquid. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1365-1368). [5285855] (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285855