Rozkład energii napre{ogonek}żeń resztkowych w strukturach dwuwarstwowych

Translated title of the contribution: Energy distribution of residual stresses in bi-layer structure

Yury Zimin, Toshitsugu Ueda, Joanna Pawłat

    Research output: Contribution to journalArticlepeer-review

    3 Citations (Scopus)

    Abstract

    The analysis of energy of elastic strain induced by the residual stresses in bonded structure in the framework of Timoshenko's model has been done. The analysis revealed the energy is due to the forces aimed at splitting the structure. The energy as well as the splitting forces strongly depended on the thickness ratio of the bonded layers and the total thickness of the structure. The dependence included the point where splitting forces were equal zero (E 1h 1 2 = E 2h 2 2). The latter allows reducing the debonding problem, often appearing in the case of bonded structures of dissimilar materials, which becomes peculiarly important in micro and nanofabrication processes.

    Translated title of the contributionEnergy distribution of residual stresses in bi-layer structure
    Original languageUndefined/Unknown
    Pages (from-to)111-113
    Number of pages3
    JournalPrzeglad Elektrotechniczny
    Volume88
    Issue number6
    Publication statusPublished - 2012

    Keywords

    • Bonding
    • Crystal quartz
    • Residual stress
    • Silicon
    • Surface processing
    • Thin surface coatings

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering

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