TY - GEN
T1 - Energy reversible Si-based NEMS Switch for nonvolatile logic systems
AU - Boodhoo, Liam
AU - Lin, Yun Peng
AU - Chong, Harold M.H.
AU - Tsuchiya, Yoshishige
AU - Hasegawa, Tsuyoshi
AU - Mizuta, Hiroshi
PY - 2013
Y1 - 2013
N2 - The paper presents design, analysis and fabrication of novel silicon-based, low power, non-volatile NEMS logic switches. Non-volatility is achieved by exploiting the Casimir effect and the van der Waals force at mechanical contact between an in-plane, laterally moveable transistor channel and two opposing side gates. Mechanical symmetry is implemented in the design for switching to be energy reversible. Device operation is simulated by coupling close range interatomic force calculations with 3D FEM simulation. 'On' and 'Off' transistor states are maintained by controlling the surface area of mechanical contact between the beam and the gate electrode. To achieve this, two nano-stiction state controller designs are proposed for experimental comparison. Preliminary devices have been successfully fabricated using ebeam lithography to verify minimum feature size of proposed structures.
AB - The paper presents design, analysis and fabrication of novel silicon-based, low power, non-volatile NEMS logic switches. Non-volatility is achieved by exploiting the Casimir effect and the van der Waals force at mechanical contact between an in-plane, laterally moveable transistor channel and two opposing side gates. Mechanical symmetry is implemented in the design for switching to be energy reversible. Device operation is simulated by coupling close range interatomic force calculations with 3D FEM simulation. 'On' and 'Off' transistor states are maintained by controlling the surface area of mechanical contact between the beam and the gate electrode. To achieve this, two nano-stiction state controller designs are proposed for experimental comparison. Preliminary devices have been successfully fabricated using ebeam lithography to verify minimum feature size of proposed structures.
KW - CMOS compatible
KW - NEMS
KW - energy reversible switching
KW - low power
KW - non-volatile logic
UR - http://www.scopus.com/inward/record.url?scp=84883095999&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84883095999&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2013.6559792
DO - 10.1109/NEMS.2013.6559792
M3 - Conference contribution
AN - SCOPUS:84883095999
SN - 9781467363525
T3 - 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
SP - 558
EP - 561
BT - 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
T2 - 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Y2 - 7 April 2013 through 10 April 2013
ER -