Energy reversible Si-based NEMS Switch for nonvolatile logic systems

Liam Boodhoo, Yun Peng Lin, Harold M.H. Chong, Yoshishige Tsuchiya, Tsuyoshi Hasegawa, Hiroshi Mizuta

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

The paper presents design, analysis and fabrication of novel silicon-based, low power, non-volatile NEMS logic switches. Non-volatility is achieved by exploiting the Casimir effect and the van der Waals force at mechanical contact between an in-plane, laterally moveable transistor channel and two opposing side gates. Mechanical symmetry is implemented in the design for switching to be energy reversible. Device operation is simulated by coupling close range interatomic force calculations with 3D FEM simulation. 'On' and 'Off' transistor states are maintained by controlling the surface area of mechanical contact between the beam and the gate electrode. To achieve this, two nano-stiction state controller designs are proposed for experimental comparison. Preliminary devices have been successfully fabricated using ebeam lithography to verify minimum feature size of proposed structures.

Original languageEnglish
Title of host publication8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Pages558-561
Number of pages4
DOIs
Publication statusPublished - 2013
Event8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 - Suzhou, China
Duration: 2013 Apr 72013 Apr 10

Publication series

Name8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

Other

Other8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
CountryChina
CitySuzhou
Period13/4/713/4/10

Keywords

  • CMOS compatible
  • NEMS
  • energy reversible switching
  • low power
  • non-volatile logic

ASJC Scopus subject areas

  • Biochemistry, Genetics and Molecular Biology (miscellaneous)
  • Biotechnology

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