Enhanced crystallization of strontium bismuth tantalate thin films by irradiation of elongated pulses of KrF excimer laser

Masashi Tsubuku; Kwang Soo Seol; In Hoon Choi; Yoshimichi Ohki

doi:10.1143/JJAP.45.1689

Enhanced crystallization of strontium bismuth tantalate thin films by irradiation of elongated pulses of KrF excimer laser

Masashi Tsubuku^*, Kwang Soo Seol, In Hoon Choi, Yoshimichi Ohki

^*Corresponding author for this work

Kagami Memorial Research Institute for Materials Science and Technology

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1 Citation (Scopus)

Abstract

The pulse width of a KrF excimer laser was elongated from 40 to 60ns by coupling dually split laser beams with different optical paths. By the irradiation of such elongated laser pulses up to 103 times, strontium bismuth tantalate thin films can be crystallized efficiently to perovskite at a substrate temperature of 650 °C, while the irradiation of nonelongated pulses fails to crystallize the films. The crystallized films have high remanent polarization and coercive field values. The presence of the energy threshold and the critical thickness for crystallization to perovskite is suggested.

Original language	English
Pages (from-to)	1689-1693
Number of pages	5
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	45
Issue number	3 A
DOIs	https://doi.org/10.1143/JJAP.45.1689
Publication status	Published - 2006 Mar 8

Keywords

Crystallization
Energy threshold
Laser annealing
Laser pulse width
SBT

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.45.1689

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Enhanced crystallization of strontium bismuth tantalate thin films by irradiation of elongated pulses of KrF excimer laser. / Tsubuku, Masashi; Seol, Kwang Soo; Choi, In Hoon et al.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 45, No. 3 A, 08.03.2006, p. 1689-1693.

Research output: Contribution to journal › Article › peer-review

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AB - The pulse width of a KrF excimer laser was elongated from 40 to 60ns by coupling dually split laser beams with different optical paths. By the irradiation of such elongated laser pulses up to 103 times, strontium bismuth tantalate thin films can be crystallized efficiently to perovskite at a substrate temperature of 650 °C, while the irradiation of nonelongated pulses fails to crystallize the films. The crystallized films have high remanent polarization and coercive field values. The presence of the energy threshold and the critical thickness for crystallization to perovskite is suggested.

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KW - Energy threshold

KW - Laser annealing

KW - Laser pulse width

KW - SBT

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Enhanced crystallization of strontium bismuth tantalate thin films by irradiation of elongated pulses of KrF excimer laser

Abstract

Keywords

ASJC Scopus subject areas

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