Enhanced crystallization of strontium bismuth tantalate thin films by irradiation of elongated pulses of KrF excimer laser

Masashi Tsubuku, Kwang Soo Seol, In Hoon Choi, Yoshimichi Ohki

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Abstract

The pulse width of a KrF excimer laser was elongated from 40 to 60ns by coupling dually split laser beams with different optical paths. By the irradiation of such elongated laser pulses up to 103 times, strontium bismuth tantalate thin films can be crystallized efficiently to perovskite at a substrate temperature of 650 °C, while the irradiation of nonelongated pulses fails to crystallize the films. The crystallized films have high remanent polarization and coercive field values. The presence of the energy threshold and the critical thickness for crystallization to perovskite is suggested.

Original languageEnglish
Pages (from-to)1689-1693
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number3 A
DOIs
Publication statusPublished - 2006 Mar 8

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Keywords

  • Crystallization
  • Energy threshold
  • Laser annealing
  • Laser pulse width
  • SBT

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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