Enhanced crystallization of strontium bismuth tantalate thin films by irradiation of elongated pulses of KrF excimer laser

Masashi Tsubuku, Kwang Soo Seol, In Hoon Choi, Yoshimichi Ohki

    Research output: Contribution to journalArticle

    1 Citation (Scopus)

    Abstract

    The pulse width of a KrF excimer laser was elongated from 40 to 60ns by coupling dually split laser beams with different optical paths. By the irradiation of such elongated laser pulses up to 103 times, strontium bismuth tantalate thin films can be crystallized efficiently to perovskite at a substrate temperature of 650 °C, while the irradiation of nonelongated pulses fails to crystallize the films. The crystallized films have high remanent polarization and coercive field values. The presence of the energy threshold and the critical thickness for crystallization to perovskite is suggested.

    Original languageEnglish
    Pages (from-to)1689-1693
    Number of pages5
    JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
    Volume45
    Issue number3 A
    DOIs
    Publication statusPublished - 2006 Mar 8

    Fingerprint

    Excimer lasers
    Strontium
    Bismuth
    strontium
    excimer lasers
    Perovskite
    bismuth
    Laser pulses
    Crystallization
    Irradiation
    crystallization
    Thin films
    irradiation
    Remanence
    thin films
    pulses
    optical paths
    Laser beams
    pulse duration
    laser beams

    Keywords

    • Crystallization
    • Energy threshold
    • Laser annealing
    • Laser pulse width
    • SBT

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)

    Cite this

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    abstract = "The pulse width of a KrF excimer laser was elongated from 40 to 60ns by coupling dually split laser beams with different optical paths. By the irradiation of such elongated laser pulses up to 103 times, strontium bismuth tantalate thin films can be crystallized efficiently to perovskite at a substrate temperature of 650 °C, while the irradiation of nonelongated pulses fails to crystallize the films. The crystallized films have high remanent polarization and coercive field values. The presence of the energy threshold and the critical thickness for crystallization to perovskite is suggested.",
    keywords = "Crystallization, Energy threshold, Laser annealing, Laser pulse width, SBT",
    author = "Masashi Tsubuku and Seol, {Kwang Soo} and Choi, {In Hoon} and Yoshimichi Ohki",
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    AU - Tsubuku, Masashi

    AU - Seol, Kwang Soo

    AU - Choi, In Hoon

    AU - Ohki, Yoshimichi

    PY - 2006/3/8

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    N2 - The pulse width of a KrF excimer laser was elongated from 40 to 60ns by coupling dually split laser beams with different optical paths. By the irradiation of such elongated laser pulses up to 103 times, strontium bismuth tantalate thin films can be crystallized efficiently to perovskite at a substrate temperature of 650 °C, while the irradiation of nonelongated pulses fails to crystallize the films. The crystallized films have high remanent polarization and coercive field values. The presence of the energy threshold and the critical thickness for crystallization to perovskite is suggested.

    AB - The pulse width of a KrF excimer laser was elongated from 40 to 60ns by coupling dually split laser beams with different optical paths. By the irradiation of such elongated laser pulses up to 103 times, strontium bismuth tantalate thin films can be crystallized efficiently to perovskite at a substrate temperature of 650 °C, while the irradiation of nonelongated pulses fails to crystallize the films. The crystallized films have high remanent polarization and coercive field values. The presence of the energy threshold and the critical thickness for crystallization to perovskite is suggested.

    KW - Crystallization

    KW - Energy threshold

    KW - Laser annealing

    KW - Laser pulse width

    KW - SBT

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