Enhanced oxidation of silicon using a collimated hyperthermal ozone beam

T. Nishiguchi; Y. Morikawa; M. Miyamoto; H. Nonaka; S. Ichimura

doi:10.1063/1.1380242

Enhanced oxidation of silicon using a collimated hyperthermal ozone beam

T. Nishiguchi^*, Y. Morikawa, M. Miyamoto, H. Nonaka, S. Ichimura

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

Oxidation of silicon by collimated hyperthermal ozone beam produced by pulsed-laser ablation of solid ozone, was reported. This led to decrease in the process temperature and increase in the controllability of oxidation. Laser shots, to which the number of supplied ozone molecules were propotional, were used to control the oxidation rate. Higher oxidation efficieny was reported in comparison with that by using continuous ozone spray with thermal energy.

Original language	English
Pages (from-to)	382-384
Number of pages	3
Journal	Applied Physics Letters
Volume	79
Issue number	3
DOIs	https://doi.org/10.1063/1.1380242
Publication status	Published - 2001 Jul 16
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.1380242

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abstract = "Oxidation of silicon by collimated hyperthermal ozone beam produced by pulsed-laser ablation of solid ozone, was reported. This led to decrease in the process temperature and increase in the controllability of oxidation. Laser shots, to which the number of supplied ozone molecules were propotional, were used to control the oxidation rate. Higher oxidation efficieny was reported in comparison with that by using continuous ozone spray with thermal energy.",

author = "T. Nishiguchi and Y. Morikawa and M. Miyamoto and H. Nonaka and S. Ichimura",

year = "2001",

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T1 - Enhanced oxidation of silicon using a collimated hyperthermal ozone beam

AU - Nishiguchi, T.

AU - Morikawa, Y.

AU - Miyamoto, M.

AU - Nonaka, H.

AU - Ichimura, S.

PY - 2001/7/16

Y1 - 2001/7/16

N2 - Oxidation of silicon by collimated hyperthermal ozone beam produced by pulsed-laser ablation of solid ozone, was reported. This led to decrease in the process temperature and increase in the controllability of oxidation. Laser shots, to which the number of supplied ozone molecules were propotional, were used to control the oxidation rate. Higher oxidation efficieny was reported in comparison with that by using continuous ozone spray with thermal energy.

AB - Oxidation of silicon by collimated hyperthermal ozone beam produced by pulsed-laser ablation of solid ozone, was reported. This led to decrease in the process temperature and increase in the controllability of oxidation. Laser shots, to which the number of supplied ozone molecules were propotional, were used to control the oxidation rate. Higher oxidation efficieny was reported in comparison with that by using continuous ozone spray with thermal energy.

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JF - Applied Physics Letters

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Enhanced oxidation of silicon using a collimated hyperthermal ozone beam

Abstract

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