Enhanced silicon oxidation by a hyperthermal beam obtained from laser evaporation of solid ozone

Tetsuya Nishiguchi*, Yoshiki Morikawa, Mitsuru Kekura, Masaharu Miyamoto, Hidehiko Nonaka, Shingo Ichimura

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds