Enhanced silicon oxidation by a hyperthermal beam obtained from laser evaporation of solid ozone

Tetsuya Nishiguchi, Yoshiki Morikawa, Mitsuru Kekura, Masaharu Miyamoto, Hidehiko Nonaka, Shingo Ichimura

Research output: Contribution to journalArticle

2 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy