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Enhanced silicon oxidation by a hyperthermal beam obtained from laser evaporation of solid ozone
Tetsuya Nishiguchi*, Yoshiki Morikawa, Mitsuru Kekura, Masaharu Miyamoto, Hidehiko Nonaka, Shingo Ichimura
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
2
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(Scopus)