Enhancement of GHz electromechanical coupling coefficient kt2of MgZnO and CaZnO thin film BAW resonators

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Electromechanical coupling coefficient kt2 of MgZnO and CaZnO thin films in the UHF frequency ranges have not been reported. In this study, the relationship between kt2 and dopant concentration of MgZnO and CaZnO thin films was investigated. In addition, longitudinal wave velocity VL of the MgZnO and CaZnO thin films was estimated. It has been found that kt2 and VL of MgZnO increases with increasing Mg concentration. With respect to CaZnO, {k{mathrm{t}}}-{2} increases, whereas VL decreases with increasing Ca concentration.

Original languageEnglish
Title of host publicationIUS 2020 - International Ultrasonics Symposium, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781728154480
DOIs
Publication statusPublished - 2020 Sep 7
Event2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States
Duration: 2020 Sep 72020 Sep 11

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2020-September
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2020 IEEE International Ultrasonics Symposium, IUS 2020
CountryUnited States
CityLas Vegas
Period20/9/720/9/11

Keywords

  • Electromechanical coupling
  • Longitudinal wave velocity
  • Piezoelectric material

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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