Enhancement of sensitivity for the evaluation of electrical properties by modifying the nano structure of microwave AFM probe

Lan Zhang, Yang Ju, Atsushi Hosoi, Akifumi Fujimoto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

To confirm the sensitivity in the measurement of electrical properties affected by the nano structure of microwave AFM (M-AFM) probe, three kinds of M-AFM probe with a nano-slit on its tip in different width (75 nm, 120 nm and 160 nm) were investigated. Au and glass samples were measured by the probes working at a non-contact AFM mode. The M-AFM probe with the nano-slit having the width of 75 nm, by which the difference of the measured voltage between Au and glass samples is 55.1 mV, shows the highest sensitivity for detecting electrical properties of materials. As the result illustrated, the M-AFM probe with smaller width nano-slit on the tip can be considered to be an ideal nano structure.

Original languageEnglish
Title of host publicationAdvanced Material Science and Technology
PublisherTrans Tech Publications Ltd
Pages555-558
Number of pages4
ISBN (Print)9783037850497
DOIs
Publication statusPublished - 2011

Publication series

NameMaterials Science Forum
Volume675 677
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Keywords

  • Atomic force microscope
  • Electrical properties
  • Microwave
  • Nanotechnology

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Zhang, L., Ju, Y., Hosoi, A., & Fujimoto, A. (2011). Enhancement of sensitivity for the evaluation of electrical properties by modifying the nano structure of microwave AFM probe. In Advanced Material Science and Technology (pp. 555-558). (Materials Science Forum; Vol. 675 677). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/MSF.675-677.555