TY - JOUR
T1 - Enhancement of thermoelectric power of a Si nanowire micro thermoelectric generator by improving the thermal conductivity of AlN thermally conductive film
AU - Zhan, T.
AU - Yamato, R.
AU - Hashimoto, S.
AU - Oba, S.
AU - Himeda, Y.
AU - Xu, Y.
AU - Matsukawa, T.
AU - Watanabe, T.
N1 - Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2018/7/26
Y1 - 2018/7/26
N2 - We report the enhancement of thermoelectric power of Si nanowire micro thermoelectric generator (SiNW-μTEG) by improving the thermal conductivity of aluminum nitride (AlN) thermally conductive film. This work builds on the previous results that have been reported at SSDM 2017. [1] This work shows the measured thermal conductivities of the two different AlN films to understand the underlying mechanisms of the enhancement of the thermoelectric power.
AB - We report the enhancement of thermoelectric power of Si nanowire micro thermoelectric generator (SiNW-μTEG) by improving the thermal conductivity of aluminum nitride (AlN) thermally conductive film. This work builds on the previous results that have been reported at SSDM 2017. [1] This work shows the measured thermal conductivities of the two different AlN films to understand the underlying mechanisms of the enhancement of the thermoelectric power.
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U2 - 10.1088/1742-6596/1052/1/012131
DO - 10.1088/1742-6596/1052/1/012131
M3 - Conference article
AN - SCOPUS:85051323192
SN - 1742-6588
VL - 1052
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 012131
T2 - 17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2017
Y2 - 14 November 2017 through 17 November 2017
ER -