Enhancement of thermoelectric power of a Si nanowire micro thermoelectric generator by improving the thermal conductivity of AlN thermally conductive film

Tianzhuo Zhan, R. Yamato, S. Hashimoto, S. Oba, Y. Himeda, Y. Xu, T. Matsukawa, Takanobu Watanabe

Research output: Contribution to journalConference article

Abstract

We report the enhancement of thermoelectric power of Si nanowire micro thermoelectric generator (SiNW-μTEG) by improving the thermal conductivity of aluminum nitride (AlN) thermally conductive film. This work builds on the previous results that have been reported at SSDM 2017. [1] This work shows the measured thermal conductivities of the two different AlN films to understand the underlying mechanisms of the enhancement of the thermoelectric power.

Original languageEnglish
Article number012131
JournalJournal of Physics: Conference Series
Volume1052
Issue number1
DOIs
Publication statusPublished - 2018 Jul 26
Event17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2017 - Kanazawa, Japan
Duration: 2017 Nov 142017 Nov 17

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thermoelectric generators
aluminum nitrides
nanowires
thermal conductivity
augmentation

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Enhancement of thermoelectric power of a Si nanowire micro thermoelectric generator by improving the thermal conductivity of AlN thermally conductive film. / Zhan, Tianzhuo; Yamato, R.; Hashimoto, S.; Oba, S.; Himeda, Y.; Xu, Y.; Matsukawa, T.; Watanabe, Takanobu.

In: Journal of Physics: Conference Series, Vol. 1052, No. 1, 012131, 26.07.2018.

Research output: Contribution to journalConference article

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