Enhancing Delta e Effect at High Temperatures of Galfenol/Ti/Single-Crystal Diamond Resonators for Magnetic Sensing

Zilong Zhang, Haihua Wu, Liwen Sang, Yukiko Takahashi, Jian Huang*, Linjun Wang, Masaya Toda, Indianto Mohammad Akita, Yasuo Koide, Satoshi Koizumi, Meiyong Liao

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

A conventional wisdom is that the sensing properties of magnetic sensors at high temperatures will be degraded due to the materials' deterioration. Here, the concept of high-temperature enhancing magnetic sensing is proposed based on the hybrid structure of SCD MEMS resonator functionalized with a high thermal-stable ferromagnetic galfenol (FeGa) film. The delta E effect of the magnetostrictive FeGa thin film on Ti/SCD cantilevers is investigated by varying the operating temperature from 300 to 773 K upon external magnetic fields. The multilayer structure magnetic sensor presents a high sensitivity of 71.1 Hz/mT and a low noise level of 10 nT/√Hz at 773 K for frequencies higher than 7.5 kHz. The high-temperature magnetic sensing performance exceeds those of the reported magnetic sensors. Furthermore, an anomalous behavior is observed on the delta E effect, which exhibits a positive temperature dependence with the law of Tn. Based on the resonance frequency shift of the FeGa/Ti/SCD cantilever, the strain coupling in the multilayers of the FeGa/Ti/SCD structure under a magnetic field is strengthened with increasing temperature. The delta E effect shows a strong relationship with the azimuthal angle, θ, as a sine function at 300 and 773 K. This work provides a strategy to develop magnetic sensors for high-temperature applications with performance superior to that of the present ones.

Original languageEnglish
Pages (from-to)23155-23164
Number of pages10
JournalACS Applied Materials and Interfaces
Volume12
Issue number20
DOIs
Publication statusPublished - 2020 May 20
Externally publishedYes

Keywords

  • MEMS
  • galfenol film
  • high-temperature magnetic sensor
  • interface coupling
  • single-crystal diamond

ASJC Scopus subject areas

  • Materials Science(all)

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